Research Status of Plasma Etching Resistance Ceramic

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2018, Vol. 47 ›› Issue (6): 1272-1279.

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Research Status of Plasma Etching Resistance Ceramic

TAN Yi-cheng;WU Shang-hua;ZHU Zuo-xiang;XIANG Qi-jun;ZHU Zu-yun;TIAN Zhuo

Online:2018-06-15 Published:2021-01-20

Abstract

CLC Number:

TB332

TAN Yi-cheng;WU Shang-hua;ZHU Zuo-xiang;XIANG Qi-jun;ZHU Zu-yun;TIAN Zhuo. Research Status of Plasma Etching Resistance Ceramic[J]. Journal of Synthetic Crystals, 2018, 47(6): 1272-1279.

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Research Status of Plasma Etching Resistance Ceramic

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