Influence of Different Crystallographic Planes on CMP Performance of SiC Wafer

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (1): 155-159.

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Influence of Different Crystallographic Planes on CMP Performance of SiC Wafer

CHEN Guo-mei;NI Zi-feng;QIAN Shan-hua;LIU Yuan-xiang;DU Chun-kuan;ZHOU Ling;XU Yi-cen;ZHAO Yong-wu

Online:2019-01-15 Published:2021-01-20

Abstract

CLC Number:

TN305

CHEN Guo-mei;NI Zi-feng;QIAN Shan-hua;LIU Yuan-xiang;DU Chun-kuan;ZHOU Ling;XU Yi-cen;ZHAO Yong-wu. Influence of Different Crystallographic Planes on CMP Performance of SiC Wafer[J]. Journal of Synthetic Crystals, 2019, 48(1): 155-159.

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Influence of Different Crystallographic Planes on CMP Performance of SiC Wafer

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