Structure and Transparent Conductive Properties of AZO Thin Films Prepared by Reactive Magnetron Sputtering

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (3): 443-449.

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Structure and Transparent Conductive Properties of AZO Thin Films Prepared by Reactive Magnetron Sputtering

ZHU Bai-lin;LI Kun-peng;XIE Ting;WU Jun

Online:2019-03-15 Published:2021-01-20

Abstract

CLC Number:

O735

ZHU Bai-lin;LI Kun-peng;XIE Ting;WU Jun. Structure and Transparent Conductive Properties of AZO Thin Films Prepared by Reactive Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2019, 48(3): 443-449.

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Structure and Transparent Conductive Properties of AZO Thin Films Prepared by Reactive Magnetron Sputtering

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