Flow Structure Improvement of Electronic Grade Polysilicon Reactor Based on Numerical Simulation

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (3): 545-549.

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Flow Structure Improvement of Electronic Grade Polysilicon Reactor Based on Numerical Simulation

LIANG Shi-min;ZHANG Sheng-tao;HE Yin-feng;FU Hao;ZHAO Li-li

Online:2019-03-15 Published:2021-01-20

Abstract

CLC Number:

O735

LIANG Shi-min;ZHANG Sheng-tao;HE Yin-feng;FU Hao;ZHAO Li-li. Flow Structure Improvement of Electronic Grade Polysilicon Reactor Based on Numerical Simulation[J]. Journal of Synthetic Crystals, 2019, 48(3): 545-549.

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Flow Structure Improvement of Electronic Grade Polysilicon Reactor Based on Numerical Simulation

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