Microstructure and Conductivity of the C Doped h-BN Thin Films Prepared by Different Magnetron Sputtering Methods

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2019, Vol. 48 ›› Issue (5): 846-853.

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Microstructure and Conductivity of the C Doped h-BN Thin Films Prepared by Different Magnetron Sputtering Methods

JIANG Si-yu;XIONG Fen;WU Jun;ZHU Bai-lin;GUO Cai-sheng;YAO Ya-gang;GAN Zhang-hua;LIU Jing

Online:2019-05-15 Published:2021-01-20

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CLC Number:

TN304

JIANG Si-yu;XIONG Fen;WU Jun;ZHU Bai-lin;GUO Cai-sheng;YAO Ya-gang;GAN Zhang-hua;LIU Jing. Microstructure and Conductivity of the C Doped h-BN Thin Films Prepared by Different Magnetron Sputtering Methods[J]. Journal of Synthetic Crystals, 2019, 48(5): 846-853.

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Microstructure and Conductivity of the C Doped h-BN Thin Films Prepared by Different Magnetron Sputtering Methods

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