Study on the Growth of High Quality 6-Inch N-type 4H-SiC Single Crystal

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (4): 570-575.

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Study on the Growth of High Quality 6-Inch N-type 4H-SiC Single Crystal

LIU Bing;PU Hongbin;ZHAO Ran;ZHAO Ziqiang;BAO Huiqiang;LI Longyuan;LI Jin;LIU Sujuan

Online:2020-04-15 Published:2021-01-20

Abstract

CLC Number:

TN304.2
O782

LIU Bing;PU Hongbin;ZHAO Ran;ZHAO Ziqiang;BAO Huiqiang;LI Longyuan;LI Jin;LIU Sujuan. Study on the Growth of High Quality 6-Inch N-type 4H-SiC Single Crystal[J]. Journal of Synthetic Crystals, 2020, 49(4): 570-575.

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Study on the Growth of High Quality 6-Inch N-type 4H-SiC Single Crystal

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