Fabrication and Research of FBAR Based on Doped Piezoelectric Film

JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (6): 1040-1043.

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Fabrication and Research of FBAR Based on Doped Piezoelectric Film

LAN Weihao;XU Yang;ZHANG Yongchuan;JIANG Pingying;SI Meiju;LIU Ya;LU Dandan;HE Xiliang

Online:2020-06-15 Published:2021-01-20

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TN65

LAN Weihao;XU Yang;ZHANG Yongchuan;JIANG Pingying;SI Meiju;LIU Ya;LU Dandan;HE Xiliang. Fabrication and Research of FBAR Based on Doped Piezoelectric Film[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2020, 49(6): 1040-1043.

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Fabrication and Research of FBAR Based on Doped Piezoelectric Film

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