Polycrystalline Silicon Ingot Production Gas Online Detection System

JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (6): 1094-1100.

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Polycrystalline Silicon Ingot Production Gas Online Detection System

ZHOU Shezhu;MA Xiu;FENG Guangzhi;WANG Huiming

Online:2020-06-15 Published:2021-01-20

Abstract

CLC Number:

TQ160.5
TQ09

ZHOU Shezhu;MA Xiu;FENG Guangzhi;WANG Huiming. Polycrystalline Silicon Ingot Production Gas Online Detection System[J]. Journal of Synthetic Crystals, 2020, 49(6): 1094-1100.

Polycrystalline Silicon Ingot Production Gas Online Detection System

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