Preparation of BaTiO3 Thin Film and Its Application in Electro-Optic Modulator

Abstract

Abstract: BaTiO₃ has become the key materials for the preparation of high-performance electro-optical modulators due to its high electro-optical coefficient, excellent piezoelectric properties and nonlinear optical properties. The quality, growth orientation and electro-optic coefficient of the film are determined by the preparation method, experimental condition and the selection of substrate, and further affecting the propagation loss, half-wave voltage and extinction ratio of the electro-optical modulator. Based on the working principle of electro-optical modulator, the factors affecting the orientation and quality of film forming were discussed by focusing on the preparation methods, experimental conditions and film substrates of BaTiO₃ thin film in this paper. The advantages and disadvantages of each process of BaTiO₃ thin film preparation were analyzed, the structure and performance of waveguide were discussed. Finally, the direction of optimizing BaTiO₃ thin film fabrication and waveguide fabrication process in the future were summarized in this paper.

Key words: BaTiO₃ thin film, electro-optic modulator, waveguide, electro-optic coefficient, chemical vapor deposition method, molecular beam epitaxy method

CLC Number:

O484
O439

REN Yijing, MA Xinguo, ZHANG Feng, LU Jingjing, ZHANG Li, WANG Han. Preparation of BaTiO₃ Thin Film and Its Application in Electro-Optic Modulator[J]. Journal of Synthetic Crystals, 2023, 52(4): 688-700.

References

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Preparation of BaTiO₃ Thin Film and Its Application in Electro-Optic Modulator

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