High-Power Multi-Junction 905 nm Vertical-Cavity Surface-Emitting Lasers

Abstract

Abstract: Three-junction 905 nm vertical-cavity surface-emitting laser (VCSEL) was designed and fabricated for medium and long range sensing applications such as lidar. Through simulations using PICS3D software, the optimal adjacent active region spacing and number of P-type distributed Bragg reflectors (DBR) in the multi-junction VCSEL were determined, resulting in a design featuring a 2λ adjacent active region spacing and 14 pairs of P-type DBR. Using this design, a 100-element three-junction VCSEL array was grown and fabricated with an oxide aperture of 15 μm. The resulting array achieves a maximum peak power of 24.7 W and a peak power density of 182 W/mm² under narrow pulse conditions (with a pulse width of 100 ns and a duty cycle of 0.05%).

Key words: vertical-cavity surface-emitting laser, multi-diode cascade, metal-organic chemical vapor deposition, tunnel junction, standing wave pattern, narrow pulse measurement

CLC Number:

TN248.4

ZHAO Feiyun, REN Aobo, WU Jiang. High-Power Multi-Junction 905 nm Vertical-Cavity Surface-Emitting Lasers[J]. Journal of Synthetic Crystals, 2023, 52(5): 818-824.

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