| [1] |
XIE Guijiu, ZHANG Wenbin, WANG Yan, SONG Zhen, ZHANG Bing.
Effect of SiC Wafer Grinding Process on Surface Damage
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(6): 967-972.
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| [2] |
WANG Shuo, YANG Fashun, MA Kui.
Scallop Pattern Reduction of Through Silicon Via by Multiple Thermal Oxidation
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(6): 1131-1137.
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| [3] |
MA Rui;WANG Jian-bin;ZHOU Chao-qun;TONG Yong-qiang;XU Yi-liang.
Experimental Study on the Measurement of Subsurface Damage of Ground Sapphire by Corrosion Method
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2019, 48(12): 2216-2221.
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| [4] |
WEI Ye;ZHOU Bing;SANG Sheng-bo;DENG Xiao;CHAI Jing;CHEN Ze-hua;ZHANG Wen-dong.
Mechanism Study on Size Effects of Cluster Implantation on Silicon
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(6): 1064-1071.
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| [5] |
GUO Yu;PENG Tong-hua;LIU Chun-jun;YUAN Wen-xia;CAI Zhen-li;ZHANG He;WANG Bo.
Key Parameters of Chemical Mechanical Polishing for Obtaining Defect Free 4H-type Conductive SiC Substrate Surface
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2017, 46(5): 759-765.
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| [6] |
XU Long-hua;XU Chong-hai;WU Guang-yong;XIAO Guang-chun;YI Ming-dong.
Preparation of CaF2 Powder Coated with Ni-B by Ultrasonic Electroless Plating
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(1): 252-258.
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| [7] |
CHEN Jin;YANG Ying;XING Qing-qing;ZHANG Li;CHAO Miao-miao;MU Mei-shan.
Sulfur Passivation Processing on Silicon Surface of 6H-SiC
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(11): 3000-3004.
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| [8] |
LIANG Qing-rui;HU Xiao-bo;CHEN Xiu-fang;XU Xian-gang;ZONG Yan-min;WANG Xi-jie.
Chemical Mechanical Polishing of 4H-SiC with Strong Oxidizing Slurry
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(7): 1741-1747.
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| [9] |
LIANG Qing-rui;ZONG Yan-min;WANG Xi-jie;CHEN Xiu-fang;XU Xian-gang;HU Xiao-bo.
Effect of Diamond Powder on SiC Mechanical Polishing
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(2): 295-300.
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| [10] |
WANG Jin-pu;BAI Lin-shan;CHU Xiang-feng.
Investigation on Chemical Mechanical Polish of Glass Ceramics Substrate of Hard Disk
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2015, 44(1): 216-220.
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| [11] |
LI Feng;YANG Ying;LI Bi-shan;CHEN Jin;XING Qing-qing;HOU Zhi-bin.
Research on the Effect and Stability of Sulfur-passivated Si(100) Surface
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2014, 43(7): 1657-1661.
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| [12] |
XIONG Wei;CHU Xiang-feng;DONG Yong-ping;BI Lei;YE Ming-fu;SUN Wen-qi.
Effect of Different Abrasives on Sapphire Chemical-Mechanical Polishing
[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(6): 1064-1069.
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