High-efficiency and Low-damage Chemical Mechanical Polishing Process of CdZnTe Crystals

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2009, Vol. 38 ›› Issue (2): 416-421.

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High-efficiency and Low-damage Chemical Mechanical Polishing Process of CdZnTe Crystals

LI Yan;KANG Ren-ke;GAO Hang;WU Dong-jiang;WANG Ke

Online:2009-04-15 Published:2021-01-20

Abstract

CLC Number:

TH161

LI Yan;KANG Ren-ke;GAO Hang;WU Dong-jiang;WANG Ke. High-efficiency and Low-damage Chemical Mechanical Polishing Process of CdZnTe Crystals[J]. Journal of Synthetic Crystals, 2009, 38(2): 416-421.

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High-efficiency and Low-damage Chemical Mechanical Polishing Process of CdZnTe Crystals

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