Abstract: The c-BN films were prepared by radio frequency magnetron sputtering on the nanocrystalline and microcrystalline diamond films.Diamond films were characterized by Raman spectroscopy and atomic force microscopy.Fourier transform infrared spectroscopy (FTIR) was adopted to characterize the effect of different deposition temperatures on the growth of BN films. Experimental results show that there isn't threshold temperature occurs on the deposition of c-BN, and the content of cubic phase in the BN films prepared at room temperature could be more than 70;. When the nanocrystalline diamond films are used as substrates, the content of cubic phase in the BN films will decrease as the temperature increasing. Furthermore, the FTIR peak corresponding to c-BN shifts to a lower wavenumber with decreasing the growth temperature, indicating that less stress appears in the c-BN films at a lower growth temperature.The reason caused this phenomenon was dissused in this paper.