Effect of Target-to-substrate Distance on the Properties of Zirconium-doped Zinc Oxide Transparent Conductive Films

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2010, Vol. 39 ›› Issue (6): 1412-1416.

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Effect of Target-to-substrate Distance on the Properties of Zirconium-doped Zinc Oxide Transparent Conductive Films

ZHANG Hua-fu;CHEN Qin-sheng;LIU Han-fa

Online:2010-12-15 Published:2021-01-20

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ZHANG Hua-fu;CHEN Qin-sheng;LIU Han-fa. Effect of Target-to-substrate Distance on the Properties of Zirconium-doped Zinc Oxide Transparent Conductive Films[J]. Journal of Synthetic Crystals, 2010, 39(6): 1412-1416.

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Effect of Target-to-substrate Distance on the Properties of Zirconium-doped Zinc Oxide Transparent Conductive Films

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