JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (10): 2065-2070.
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LI Shu-juan;HU Hai-ming;LI Yan;GAO Xin-qin
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CLC Number:
TG580
LI Shu-juan;HU Hai-ming;LI Yan;GAO Xin-qin. Mechanism and Experiment on Lapping SiC Single Crystal Wafer[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2013, 42(10): 2065-2070.
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