Deposition of High Quality Diamond Films with High Power by a Circumferential Antenna Ellipsoidal Cavity Type MPCVD Reactor

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (8): 2028-2033.

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Deposition of High Quality Diamond Films with High Power by a Circumferential Antenna Ellipsoidal Cavity Type MPCVD Reactor

LI Yi-feng;TANG Wei-zhong;SU Jing-jie;AN Xiao-ming;LIU Xiao-chen;JIANG Long;SUN Zhen-lu

Online:2016-08-15 Published:2021-01-20

Abstract

CLC Number:

O614

LI Yi-feng;TANG Wei-zhong;SU Jing-jie;AN Xiao-ming;LIU Xiao-chen;JIANG Long;SUN Zhen-lu. Deposition of High Quality Diamond Films with High Power by a Circumferential Antenna Ellipsoidal Cavity Type MPCVD Reactor[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2016, 45(8): 2028-2033.

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Deposition of High Quality Diamond Films with High Power by a Circumferential Antenna Ellipsoidal Cavity Type MPCVD Reactor

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