Abstract: The YBa2Cu3O7-δ(YBCO)superconducting film was fabricated epitaxially on STO(001) substrate by pulsed laser deposition method (PLD) in O2/Ar mixture atmosphere with the mass flow rate ratio of 1∶3.The density of the particles with submicron to micron-sized distributed on the film surface is lower compared with the YBCO film deposited by traditional PLD method.The supconducting transition temperature (Tc) is above 90 K measured by DC resistance as well as the magnectic susceptibility.The zero field critical current density (Jc) is 63.8 MA/cm2, 28.3 MA/cm2 and 8.7 MA/cm2 at 40 K, 65 K and 77 K, respectively.The flux pinning force density reaches the maximum of 387.9 GN/m3 at 5.2 T, 71.3 GN/m3 at 2.6 T, and 12.1 GN/m3 at 0.91 T at 40 K, 65 K and 77 K, respectively.The experimental results provide valuable reference for further study of superconducting films deposited in Ar/O2 mixture atmosphere by PLD method.

Key words: The YBa2Cu3O7-δ(YBCO)superconducting film was fabricated epitaxially on STO(001) substrate by pulsed laser deposition method (PLD) in O2/Ar mixture atmosphere with the mass flow rate ratio of 1∶3.The density of the particles with submicron to micron-sized distributed on the film surface is lower compared with the YBCO film deposited by traditional PLD method.The supconducting transition temperature (Tc) is above 90 K measured by DC resistance as well as the magnectic susceptibility.The zero field critical current density (Jc) is 63.8 MA/cm2, 28.3 MA/cm2 and 8.7 MA/cm2 at 40 K, 65 K and 77 K, respectively.The flux pinning force density reaches the maximum of 387.9 GN/m3 at 5.2 T, 71.3 GN/m3 at 2.6 T, and 12.1 GN/m3 at 0.91 T at 40 K, 65 K and 77 K, respectively.The experimental results provide valuable reference for further study of superconducting films deposited in Ar/O2 mixture atmosphere by PLD method.