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JOURNAL OF SYNTHETIC CRYSTALS ›› 2020, Vol. 49 ›› Issue (7): 1168-1175.

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Influence of Inlet Structure of Planetary Reactor on Gas Reaction Path and Growth Rate in AlN-MOCVD

MAO Yanlin;ZUO Ran   

  • Online:2020-07-15 Published:2021-01-20

CLC Number: