Influence of Fit Parameters on Driving System of Single Crystal Furnace

Abstract

Abstract: With the development of photovoltaic industry, the demand for silicon materials increases, and the competition in monocrystalline silicon manufacturing is becoming increasingly fierce. To improve efficiency and reduce cost, single crystal furnace operating under a driving system with high stability and reliability is of importance. This paper aims to design and optimize the driving system of the single crystal furnace. The driving system of NVT-HG2000-V1 silicon single crystal growth furnace was taken as the research object. The virtual assembly with SolidWorks 3D modeling was realized, and its dynamic simulation model with ADAMS was established. Then the motion process of the driving system was simulated. Using single variable method, the influence of the fit clearance between copper sleeve and lifting shaft as well as the screw parameters on the driving force and torque was quantitatively analyzed. The results show that when the fit clearance between copper sleeve and lifting shaft reaches 0.071 mm, the driving torque required for the operation of the driving system can effectively reduces. The increase of lead screw inclination, thread pitch and friction coefficient between threads will lead to a significant increase in the torque required for the operation of the driving system. Reasonable technical suggestions have been proposed based on the research.

Key words: monocrystalline silicon, single crystal furnace, drive system, fit clearance, screw, simulation

CLC Number:

O313.7
TP273

HUANG Ming, WANG Wei. Influence of Fit Parameters on Driving System of Single Crystal Furnace[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(4): 594-599.

References

[1] 张西亚,高德东,王珊,等.热屏下降式单晶炉设计与研究[J].人工晶体学报,2021,50(6):987-995.
ZHANG X Y, GAO D D, WANG S, et al. Design and research on descended heat shield of the single crystal furnace[J]. Journal of Synthetic Crystals, 2021, 50(6): 987-995(in Chinese).
[2] ZHENG X D, TU Y L, MO X T. Research on temperature control of single crystal furnace based on neural network[C]//Proceedings of 2019 3rd International Conference on Artificial intelligence,Systems,and Computing Technology(AISCT 2019).Francis Academic Press,2019:325-331.
[3] 张永亮,陈旭,姚家胜,等.基于改进遗传算法的电机公差优化设计[J].机械强度,2021,43(3):608-614.
ZHANG Y L, CHEN X, YAO J S, et al. Motor tolerance optimization design based on improved genetic algorithm[J]. Journal of Mechanical Strength, 2021, 43(3): 608-614(in Chinese).
[4] 严冬青.试论机械设计与机械制造中的公差配合[J].中国设备工程,2021(13):157-158.
YAN D Q. Discussion on tolerance coordination in mechanical design and manufacturing[J]. China Plant Engineering, 2021(13): 157-158(in Chinese).
[5] 赵东平,田锡天,耿俊浩.基于间隙连接件和多维矢量环的机构装配精度预测[J].计算机集成制造系统,2015,21(4):963-970.
ZHAO D P, TIAN X T, GENG J H. Kinematic assembly precision prediction based on gap connectors and multidimensional vector loop[J]. Computer Integrated Manufacturing Systems, 2015, 21(4): 963-970(in Chinese).
[6] 杜一民,李志辉,贾学志,等.振动环境下传动螺纹配合间隙对其自锁性的影响[J].机械强度,2019,41(3):509-514.
DU Y M, LI Z H, JIA X Z, et al. Influence of screw drive fit clearance on self-locking ability under vibrating inspiration[J]. Journal of Mechanical Strength, 2019, 41(3): 509-514(in Chinese).
[7] DUPONT P E. The effect of Coulomb friction on the existence and uniqueness of the forward dynamics problem[C]//Proceedings 1992 IEEE International Conference on Robotics and Automation. May 12-14, 1992, Nice, France. IEEE, 1992: 1442-1447.
[8] DUPONT P E, YAMAJAKO S P. Stability of frictional contact in constrained rigid-body dynamics[J]. IEEE Transactions on Robotics and Automation, 1997, 13(2): 230-236.
[9] GALLINA P, GIOVAGNONI M. Design of a screw jack mechanism to avoid self-excited vibrations[J]. Journal of Dynamic Systems, Measurement, and Control, 2002, 124(3): 477-480.
[10] GALLINA P. Vibration in screw jack mechanisms: experimental results[J]. Journal of Sound and Vibration, 2005, 282(3/4/5): 1025-1041.
[11] 张武,高启坤,杨晓苞,等.丝杠螺母副升降机构动力学稳定性分析[J].火控雷达技术,2011,40(2):76-81.
ZHANG W, GAO Q K, YANG X B, et al. Analysis of dynamics stability of screw-nut auxiliary elevating mechanism[J]. Fire Control Radar Technology, 2011, 40(2): 76-81(in Chinese).
[12] 李梅,杨平,何波,等.螺旋升降机丝杠螺母副自激振动分析[J].组合机床与自动化加工技术,2016(4):56-58.
LI M, YANG P, HE B, et al. Self-excited vibration analysis of screw-nut auxiliary self-excited vibration analysis of screw-nut auxiliary[J]. Modular Machine Tool & Automatic Manufacturing Technique, 2016(4): 56-58(in Chinese).
[13] 王坤,邢海军,徐梦超,等.基于ADAMS的多刚体动力学简化建模与仿真[J].图学学报,2019,40(4):733-738.
WANG K, XING H J, XU M C, et al. Simplified modeling and simulation of multi rigid body dynamics based on ADAMS[J]. Journal of Graphics, 2019, 40(4): 733-738(in Chinese).
[14] 冯旻,门星宇,宋胜伟.基于Adams的可摘挂架空乘人装置动力学仿真[J].煤炭技术,2021,40(8):215-218.
FENG M, MEN X Y, SONG S W. Dynamic simulation of removable overhead passenger device based on Adams[J]. Coal Technology, 2021, 40(8): 215-218(in Chinese).
[15] 张伟,刘阳,侯博文,等.螺距误差下的螺纹副应力分布及其对装配预紧力的影响研究[J].机械工程学报,2021,57(17):132-148.
ZHANG W, LIU Y, HOU B W, et al. Effect of pitch difference on stress distribution of thread pair and preload[J]. Journal of Mechanical Engineering, 2021, 57(17): 132-148(in Chinese).