Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent

Abstract

Abstract: The improved Siemens method is the main method for polycrystalline silicon production, and the polycrystalline silicon reduction furnace is the main equipment for polycrystalline silicon preparation. Aiming at the problem of irregular size of polycrystalline silicon produced by the uneven flow field, temperature field, and radiation field of traditional polycrystalline silicon reduction furnaces. This article optimizes the design of the furnace top sealing head structure, air outlet layout, and silicon rod chassis layout of the reduction furnace. Using the Do radiation module of Fluent software, a gas-solid radiation simulation analysis was conducted on a polycrystalline silicon reduction furnace. The cloud and streamline diagrams of the flow field, temperature field, and radiation field before and after optimization were compared. The results show that the exhaust design of the up-outlet effectively improve the gas flow velocity in the furnace, reduce gas reflux, increase gas flow uniformity, effectively solve the temperature dead zone generated at the top of the furnace, and balance the temperature difference between the upper and lower parts of the furnace; the elliptical top head optimizes the overall space of the reduction furnace, reduces design costs, effectively inhibits the generation of gas vortices in the circular head, and increases the uniformity of gas flow in the furnace; at the same time, a parallel circular symmetric silicon rod is used to increase the overall radiation amount, optimizing the uneven radiation phenomenon between the outer ring silicon rod and the central silicon rod in traditional reduction furnaces, effectively preventing the generation of irregular silicon rods, improving the production of polycrystalline silicon, and providing a new solution for the design of polycrystalline silicon reduction furnaces.

Key words: polycrystalline silicon reduction furnace, Do radiation module, structural design, air outlet layout, furnace top sealing head, silicon rod chassis layout

CLC Number:

TK175
O78

SUN Zegang, GE Zihao, SHI Rongqiu, FEI Tianwen. Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(11): 1952-1960.

References

[1] 宋张佐. 多晶硅还原炉产能影响因素分析及提升措施[J]. 山东化工, 2019, 48(9): 143-144.
SONG Z Z. Analysis of factors affecting productivity of polysilicon reduction furnace and improvement measures[J]. Shandong Chemical Industry, 2019, 48(9): 143-144 (in Chinese).
[2] 石何武, 汪绍芬, 郑红梅, 等. 多晶硅还原炉装备发展展望[J]. 有色设备, 2020(1): 1-3+29.
SHI H W, WANG S F, ZHENG H M, et al. Development prospect of polysilicon reduction furnace equipment[J]. Nonferrous Metallurgical Equipment, 2020(1): 1-3+29 (in Chinese).
[3] DEL COSO G, DEL CAÑIZO C, LUQUE A. Radiative energy loss in a polysilicon CVD reactor[J]. Solar Energy Materials and Solar Cells, 2011, 95(4): 1042-1049.
[4] DEL COSO G, TOBÍAS I, CAÑIZO C, et al. Temperature homogeneity of polysilicon rods in a Siemens reactor[J]. Journal of Crystal Growth, 2007, 299(1): 165-170.
[5] AN L S, LEI X S, QI X, et al. Heat and mass transfer characteristics of three-dimensional bell-shaped polysilicon chemical vapor deposition reactor[J]. Journal of Thermal Analysis and Calorimetry, 2020, 141(1): 323-335.
[6] 张胜涛. 基于数值模拟电子级多晶硅生长还原炉耦合工艺研究[D]. 哈尔滨: 哈尔滨工业大学, 2019.
ZHANG S T. Study on coupling process of reduction furnace for electronic-grade polysilicon growth based on numerical simulation[D].Harbin: Harbin Institute of Technology, 2019 (in Chinese).
[7] 王晓静, 张灿, 黄益平, 等. 新型还原炉流场温度场的模拟研究[J]. 化学工业与工程, 2016, 33(4): 56-60.
WANG X J, ZHANG C, HUANG Y P, et al. The simulation of flow and heat transfer in a new polycrystalline silicon reduction furnace[J]. Chemical Industry and Engineering, 2016, 33(4): 56-60 (in Chinese).
[8] 徐远志, 刘阳赞, 侯彦清, 等. 12对棒多晶硅还原炉传热的数值模拟研究[J]. 云南冶金, 2018, 47(1): 57-62.
XU Y Z, LIU Y Z, HOU Y Q, et al. Numerical simulation study on heat transfer in 12 rod polysilicon CVD reactor[J]. Yunnan Metallurgy, 2018, 47(1): 57-62 (in Chinese).
[9] 李有斌, 陈叮琳, 俞朝. 还原炉倒棒原因及改进措施研究[J]. 中国石油和化工标准与质量, 2022, 42(3): 47-49.
LI Y B, CHEN D L, YU C. Study on the causes and improvement measures of rod falling in reduction furnace[J]. China Petroleum and Chemical Standard and Quality, 2022, 42(3): 47-49 (in Chinese).
[10] 梁世民, 张胜涛, 何银凤, 等. 基于数值模拟电子级多晶硅还原炉流动结构改进研究[J]. 人工晶体学报, 2019, 48(3): 545-549.
LIANG S M, ZHANG S T, HE Y F, et al. Flow structure improvement of electronic grade polysilicon reactor based on numerical simulation[J]. Journal of Synthetic Crystals, 2019, 48(3): 545-549 (in Chinese).
[11] 文亚琪, 魏敏, 武俊峰, 等. 基于Fluent多晶硅还原炉内部辐射换热的模拟分析[J]. 石河子大学学报(自然科学版), 2016, 34(5): 654-660.
WEN Y Q, WEI M, WU J F, et al. The simulation analysis on internal radiation heat transfer simulation of polysilicon reduction furnace based on fluent[J]. Journal of Shihezi University (Natural Science), 2016, 34(5): 654-660 (in Chinese).
[12] 孙鹏. 多晶硅还原炉流场、温度场数值模拟及能耗分析[D]. 武汉: 华中科技大学, 2012.
SUN P. Numerical simulation and energy consumption analysis of flow field and temperature field in polysilicon reduction furnace[D].Wuhan: Huazhong University of Science and Technology, 2012 (in Chinese).
[13] 王品杰. 多场耦合作用下多晶硅还原炉能量耗散机理研究[D]. 昆明: 昆明理工大学, 2021.
WANG P J. Study on energy dissipation mechanism of polysilicon reduction furnace under multi-field coupling[D].Kunming: Kunming University of Science and Technology, 2021 (in Chinese).
[14] 马越. 多晶硅还原炉内温度场模拟[D]. 徐州: 中国矿业大学, 2019.
MA Y. Simulation of temperature field in polysilicon reduction furnace[D]. Xuzhou: China University of Mining and Technology, 2019 (in Chinese).
[15] 秦榕. 多晶硅还原炉内流动与传热过程数值模拟与优化[D]. 西安: 西北大学, 2018.
QIN R. Numerical simulation and optimization of flow and heat transfer process in polysilicon reduction furnace[D]. Xi'an: Northwest University, 2018 (in Chinese).
[16] 杨楠, 杨志国, 施汉文, 等. 不同出气方式时多晶硅还原炉内的流场和热场模拟[J]. 太阳能, 2020(7): 42-47.
YANG N, YANG Z G, SHI H W, et al. Simulation of flow field and thermal field in polysilicon reduction furnace with different gas outlet modes[J]. Solar Energy, 2020(7): 42-47 (in Chinese).
[17] 李帅东. 多晶硅还原生产常见问题及控制对策分析[J]. 山西化工, 2022, 42(5): 68-70.
LI S D. Analysis of common problems and control countermeasures in polysilicon reduction production[J]. Shanxi Chemical Industry, 2022, 42(5): 68-70 (in Chinese).
[18] 程俊. 还原炉内多晶硅生长速率控制方法研究[J]. 四川化工, 2022, 25(6): 34-36+44.
CHENG J. Study on control method of polysilicon growth rate in reduction furnace[J]. Sichuan Chemical Industry, 2022, 25(6): 34-36+44 (in Chinese).
[19] 吴建宏. 基于CFD模拟优化多晶硅还原炉内的流场及温度场[J]. 清洗世界, 2021, 37(10): 43-44.
WU J H. Optimization of flow field and temperature field in polysilicon reduction furnace based on CFD simulation[J]. Cleaning World, 2021, 37(10): 43-44 (in Chinese).