Optimization Design of Key Structure of Polycrystalline Silicon Reduction Furnace Based on Fluent
SUN Zegang, GE Zihao, SHI Rongqiu, FEI Tianwen
2023, 52(11):
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The improved Siemens method is the main method for polycrystalline silicon production, and the polycrystalline silicon reduction furnace is the main equipment for polycrystalline silicon preparation. Aiming at the problem of irregular size of polycrystalline silicon produced by the uneven flow field, temperature field, and radiation field of traditional polycrystalline silicon reduction furnaces. This article optimizes the design of the furnace top sealing head structure, air outlet layout, and silicon rod chassis layout of the reduction furnace. Using the Do radiation module of Fluent software, a gas-solid radiation simulation analysis was conducted on a polycrystalline silicon reduction furnace. The cloud and streamline diagrams of the flow field, temperature field, and radiation field before and after optimization were compared. The results show that the exhaust design of the up-outlet effectively improve the gas flow velocity in the furnace, reduce gas reflux, increase gas flow uniformity, effectively solve the temperature dead zone generated at the top of the furnace, and balance the temperature difference between the upper and lower parts of the furnace; the elliptical top head optimizes the overall space of the reduction furnace, reduces design costs, effectively inhibits the generation of gas vortices in the circular head, and increases the uniformity of gas flow in the furnace; at the same time, a parallel circular symmetric silicon rod is used to increase the overall radiation amount, optimizing the uneven radiation phenomenon between the outer ring silicon rod and the central silicon rod in traditional reduction furnaces, effectively preventing the generation of irregular silicon rods, improving the production of polycrystalline silicon, and providing a new solution for the design of polycrystalline silicon reduction furnaces.