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Simulation Study on the Effect of Gallium Source Temperature on the Temperature Field in LPCVD Gallium Oxide Epitaxy
HU Jichao, ZHAO Qiyang, YANG Zhihao, YANG Ying, PENG Bo, DING Xiongjie, LIU Wei, ZHANG Hong
Journal of Synthetic Crystals . 2025, (3): 452 -461 .  DOI: 10.16553/j.cnki.issn1000-985x.2024.0305