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人工晶体学报 ›› 2025, Vol. 54 ›› Issue (6): 912-923.DOI: 10.16553/j.cnki.issn1000-985x.2025.0024

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碲锌镉晶体热退火技术的研究进展

吴啸(), 赵文, 起文斌, 宋林伟, 李向堃, 姜军, 孔金丞, 王善力()   

  1. 中国兵器科学研究院昆明物理研究所,昆明 650223
  • 收稿日期:2025-02-11 出版日期:2025-06-20 发布日期:2025-06-23
  • 通信作者: 王善力,博士,高级工程师。E-mail:wshanli@hotmail.com
  • 作者简介:吴啸(1993—),男,云南省人,博士,工程师。E-mail:1141067993@qq.com
  • 基金资助:
    云南省工业领域科技计划(202403AA080015)

Research Progress on Thermal Annealing Technologies of CZT Crystals

WU Xiao(), ZHAO Wen, QI Wenbin, SONG Linwei, LI Xiangkun, JIANG Jun, KONG Jincheng, WANG Shanli()   

  1. Kunming Institute of Physics,China Academy of Ordnance Sciences,Kunming 650223,China
  • Received:2025-02-11 Online:2025-06-20 Published:2025-06-23

摘要: 碲锌镉(CdZnTe, CZT)晶体因优异的物理特性在室温射线探测和HgCdTe红外探测领域占据重要地位。然而,CZT晶体生长过程中产生的点缺陷、沉积相和位错严重影响晶体质量和器件性能。研究表明,精心设计的退火工艺可有效降低沉积相密度,调控点缺陷浓度,提升晶体电阻率和载流子迁移率寿命积。本文深入分析了CZT晶体中缺陷的形成机理,系统评述了恒温退火、梯度退火、分步退火、器件退火、原位退火和溶液退火等技术的研究进展,比较了各种退火技术的优缺点及其对CZT晶体性能的影响,同时提出了未来研究应聚焦于深化退火机理的理解、开发新型退火技术、优化界面工程和实现智能化退火工艺,以进一步提升CZT晶体性能,推动其在高性能辐射探测和红外成像领域的应用。

关键词: 碲锌镉; 缺陷抑制; 恒温退火; 梯度退火; 分步退火; 器件退火; 原位退火; 溶液退火

Abstract: Cadmium zinc telluride (CdZnTe, CZT) crystals are highly valued in room-temperature radiation detection and HgCdTe infrared detection due to their exceptional physical properties. However, point defects, secondary phases, and dislocations formed during CZT crystals growth process significantly impact crystal quality and device performance. Research shows that well-designed annealing techniques can effectively reduce secondary phase density, control point defect concentrations, and improve crystal resistivity and carrier mobility-lifetime products. This review analyzes the mechanisms of defect formation in CZT crystals and systematically evaluates advancements in annealing technologies, including isothermal, gradient, step, device, in-situ, and solution annealing. The review also compares the merits and demerits of these annealing technologies and their effects on CZT performance, offering a guide for researchers. Future studies should focus on deepening annealing mechanism insights, developing new technologies, optimizing interface engineering, and implementing intelligent technologies to further enhance CZT crystal performance for high-performance radiation and infrared detection applications.

Key words: cadmium zinc telluride; defect suppression; isothermal annealing; gradient annealing; step annealing; device annealing; in-situ annealing; solution annealing

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