关键词: 金刚石膜;层结构;刻面;甲烷/氢气;直流等离子体喷射CCD

Abstract: High powered, 30kW, DC arc plasma jet CVD was applied to deposit novel structure of self standing diamond film. 2-, 3- and 4-layered structure films were fabricated by fluctuating the ratio of methane to hydrogen. Scanning electronic spectroscopy (SEM) results showed that the layered structures were composed of columnar grains and very fine grains. Raman spectra showed that the layer with very fine grains possessed the laser scattering feature jue to nano-sized diamond grain. A kind of novel morphology with very nice faceted surface of grain was found under very high ratio of methane to hydrogen, which of value was over 15;.

Key words: High powered, 30kW, DC arc plasma jet CVD was applied to deposit novel structure of self standing diamond film. 2-, 3- and 4-layered structure films were fabricated by fluctuating the ratio of methane to hydrogen. Scanning electronic spectroscopy (SEM) results showed that the layered structures were composed of columnar grains and very fine grains. Raman spectra showed that the layer with very fine grains possessed the laser scattering feature jue to nano-sized diamond grain. A kind of novel morphology with very nice faceted surface of grain was found under very high ratio of methane to hydrogen, which of value was over 15;.