关键词: 化学气相沉积;金刚石薄膜;织构;弹性模量;残余应力

Abstract: The relationship between texture and elastic properties of CVD diamond films was analyzed based on the phenomenological theory, which indicates the effect of crystalline orientation and texture on the residual strain and residual stress. The Young's modulus and residual strains in CVD diamond films are anisotropic and their distribution rules are opposite because of texture. Both texture and impurities can influence the Young's modulus and residual strains in CVD diamond films, in which texture plays a main role. The experimental value of the residual strains are in good agreement with the correspondingly calculated Young's modulus in connection with the fiber textures in the films. It is believed that the residual stress can be adjusted by adjusting texture of diamond films.

Key words: The relationship between texture and elastic properties of CVD diamond films was analyzed based on the phenomenological theory, which indicates the effect of crystalline orientation and texture on the residual strain and residual stress. The Young's modulus and residual strains in CVD diamond films are anisotropic and their distribution rules are opposite because of texture. Both texture and impurities can influence the Young's modulus and residual strains in CVD diamond films, in which texture plays a main role. The experimental value of the residual strains are in good agreement with the correspondingly calculated Young's modulus in connection with the fiber textures in the films. It is believed that the residual stress can be adjusted by adjusting texture of diamond films.