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人工晶体学报 ›› 2017, Vol. 46 ›› Issue (10): 1946-1950.

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Al2O3膜层制备参数对SiO2/Al2O3/PET复合膜透湿性能的影响

丁泽良;张诗淼;王双雄;林长生;周枫林   

  1. 湖南工业大学机械工程学院,株洲,412007
  • 出版日期:2017-10-15 发布日期:2021-01-20
  • 基金资助:
    国家自然科学基金(11602082);湖南省自然科学基金(2015JJ5019)

Effect of Al2O3 Film Preparation Parameters on the Moisture Permeability of SiO2/Al2O3/PET Composite Films

DING Ze-liang;ZHANG Shi-miao;WANG Shuang-xiong;LIN Chang-sheng;ZHOU Feng-lin   

  • Online:2017-10-15 Published:2021-01-20

摘要: 采用磁控溅射工艺在PET衬底上依次沉积了Al2 O3和SiO2薄膜,制备出SiO2/Al2 O3/PET复合膜.利用扫描电镜和透湿仪对复合膜的表面形貌和透湿性能进行表征.研究了制备Al2 O3膜层的射频功率、氩气流量、本底真空度和溅射时间4个参数对复合膜透湿率的影响.结果表明:复合膜的透湿率随着本底真空度的升高而减小,随着射频功率、氩气流量和溅射时间的增加均呈现先减小后增大的变化趋势;4个制备参数对复合膜透湿率的影响程度由大到小依次是本底真空度、氩气流量、射频功率、溅射时间;4个制备参数的较优组合为本地真空度0.5×10-3 Pa,射频功率300 W,溅射时间6 min,氩气流量70 mL·min-1.

关键词: 磁控溅射;SiO2/Al2O3/PET;包装膜;透湿性

Abstract: Al2 O3 film and SiO2 film were deposited on PET substrates by magnetron sputtering , and SiO2/Al2 O3/PET composite films were prepared .The surface morphology and the water vapor transmission ( WVT ) rates of the composite films were characterized by scanning electron microscopy ( SEM ) and moisture permeability instrument respectively . The influences of Al 2 O3 film preparation parameters , including radio-frequency(RF) power, argon flow, vacuum degree and sputtering time on the WVT rates of SiO2/Al2 O3/PET composite films were investigated .The results show that the WVT rates decrease with the increase in vacuum degree , and firstly decreases and then increases with the increase in RF power , argon flow and sputtering time .Among the four process parameters , vacuum degree had the greatest effect on WVT rates, followed by argon flow , RF power and sputtering time .The optimal process parameters were obtained as the vacuum degree of 0.5 ×10 -3 Pa, RF power of 300 W, sputtering time of 6 min and argon flow of 70 mL· min-1 .

Key words: Al2 O3 film and SiO2 film were deposited on PET substrates by magnetron sputtering , and SiO2/Al2 O3/PET composite films were prepared .The surface morphology and the water vapor transmission ( WVT ) rates of the composite films were characterized by scanning electron microscopy ( SEM ) and moisture permeability instrument respectively . The influences of Al 2 O3 film preparation parameters , including radio-frequency(RF) power, argon flow, vacuum degree and sputtering time on the WVT rates of SiO2/Al2 O3/PET composite films were investigated .The results show that the WVT rates decrease with the increase in vacuum degree , and firstly decreases and then increases with the increase in RF power , argon flow and sputtering time .Among the four process parameters , vacuum degree had the greatest effect on WVT rates, followed by argon flow , RF power and sputtering time .The optimal process parameters were obtained as the vacuum degree of 0.5 ×10 -3 Pa, RF power of 300 W, sputtering time of 6 min and argon flow of 70 mL· min-1 .

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