关键词: 吸收层;CdTe薄膜;射频磁控溅射;衬底温度

Abstract: Cadmium telluride (CdTe) is often used as an absorbent material for solar cells because of its excellent photoelectric properties and absorption properties.The CdTe thin films were deposited with a purity of 99.99; CdTe ceramic target for target material by RF magnetron sputtering on glass substrate.The effects of substrate temperature on the thickness,structure and optical properties of the CdTe films were investigated.The results show that with the increase of the substrate temperature,the thickness of the film decreases.All CdTe thin films are cubic sphalerite structure with a preferred orientation in (111) direction.The film has better absorption properties to visible light and decreases with the increase of substrate temperature.

Key words: Cadmium telluride (CdTe) is often used as an absorbent material for solar cells because of its excellent photoelectric properties and absorption properties.The CdTe thin films were deposited with a purity of 99.99; CdTe ceramic target for target material by RF magnetron sputtering on glass substrate.The effects of substrate temperature on the thickness,structure and optical properties of the CdTe films were investigated.The results show that with the increase of the substrate temperature,the thickness of the film decreases.All CdTe thin films are cubic sphalerite structure with a preferred orientation in (111) direction.The film has better absorption properties to visible light and decreases with the increase of substrate temperature.