甲烷浓度对碳化硅基底金刚石薄膜摩擦性能影响

摘要/Abstract

摘要： 利用热丝化学气相沉积法(HFCVD)在碳化硅基底上制备金刚石薄膜,采用场发射扫描电子显微镜、拉曼光谱仪、原子力显微镜研究了在不同甲烷浓度条件下制备的金刚石薄膜表面形貌及物相组成,在干摩擦条件下通过往复式摩擦磨损实验测试并计算了已制备金刚石薄膜的摩擦系数和磨损率,结合物相分析及摩擦磨损实验结果分析了甲烷浓度的改变对金刚石薄膜摩擦磨损性能的影响。结果表明,由于甲烷气体含量的升高,金刚石薄膜结晶质量下降,薄膜由微米晶向纳米晶转变。摩擦磨损实验结果显示:3%甲烷浓度条件下制备的金刚石薄膜耐磨性较好,磨损率为2.2×10^-7 mm³/mN;5%甲烷浓度条件下制备的金刚石薄膜摩擦系数最低(0.032),磨损率为5.7×10^-7 mm³/mN,制备的金刚石薄膜的耐磨损性能相比于碳化硅基底(磨损率为9.89×10^-5 mm³/mN)提升了两个数量级,显著提高了碳化硅基底的耐磨性。

关键词: 金刚石, 甲烷浓度, 摩擦磨损, 热丝化学气相沉积, 碳化硅基底, 耐磨性, 磨损率, 摩擦系数

Abstract: Diamond films with different methane concentrations were deposited on silicon carbide substrate by hot filament chemical vapor deposition (HFCVD). The morphology and phase of the diamond films were analyzed using field emission scanning electron microscope, Raman spectrometer, and atomic force microscope. The friction coefficient and wear rate of all the diamond films were calculated in dry sliding condition by the reciprocating friction experiment. Phase analysis and friction experiment results were used to analyze the influence of methane concentration on diamond film tribological properties. Results show that the quality of diamond crystals deteriorates with the increase of methane concentration, and the film changes from microcrystalline to nanocrystalline. The diamond film with 3% methane concentration has better wear resistance and the wear rate is 2.2×10^-7 mm³/mN; the friction coefficient of diamond films prepared at 5% methane concentration is lower (0.032), and the wear rate is 5.7×10^-7 mm³/mN. Compared with the silicon carbide substrate (9.89×10^-5 mm³/mN), the wear rate of the diamond film is improved by two orders of magnitude, which significantly improves the wear resistance of the silicon carbide substrate.

Key words: diamond, methane concentration, friction and wear, hot filament chemical vapor deposition, silicon carbide substrate, wear resistance, wear rate, friction coefficient

中图分类号:

TQ174.1

王贺, 沈建辉, 闫广宇, 吴玉厚, 张慧森. 甲烷浓度对碳化硅基底金刚石薄膜摩擦性能影响[J]. 人工晶体学报, 2021, 50(11): 2067-2074.

WANG He, SHEN Jianhui, YAN Guangyu, WU Yuhou, ZHANG Huisen. Tribological Properties of SiC-Based Diamond Films Synthesized with Different Methane Concentrations[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(11): 2067-2074.

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