高功率CO2激光器CVD金刚石窗口制备研究

人工晶体学报 ›› 2021, Vol. 50 ›› Issue (6): 1010-1015.

高功率CO₂激光器CVD金刚石窗口制备研究

安晓明^1,2, 葛新岗^1,2, 刘晓晨^1,2, 李义锋^1,2, 姜龙^1,2, 罗海瀚³

1.河北省激光研究所,石家庄 050081;
2.河北普莱斯曼金刚石科技有限公司,石家庄 050081;
3.中国科学院上海技术物理研究所,上海 200080

收稿日期:2021-05-07 出版日期:2021-06-15 发布日期:2021-07-08
通讯作者: 姜龙,副研究员。E-mail:jianglong@hediamond.cn;罗海瀚,博士,副研究员。E-mail:haihan.luo@mail.sitp.ac.cn
作者简介:安晓明(1984—),男,河北省人,助理研究员。E-mail:anxiaoming@hediamond.cn
基金资助:
国家磁约束核聚变能发展研究专项(2019YFE03100300);河北省自然科学基金(E2019302005)

Preparation of CVD Diamond Window for High Power CO₂ Laser

AN Xiaoming^1,2, GE Xingang^1,2, LIU Xiaochen^1,2, LI Yifeng^1,2, JIANG Long^1,2, LUO Haihan³

1. Hebei Institute of Laser, Shijiazhuang 050081, China;
2. Hebei Plasma Diamond Technology Co., Ltd., Shijiazhuang 050081, China;
3. Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200080, China

Received:2021-05-07 Online:2021-06-15 Published:2021-07-08

摘要/Abstract

摘要： 本文研究制备了可应用于高功率CO₂激光器的CVD金刚石窗口。首先使用环形天线-椭球谐振腔式MPCVD装置沉积制备直径2英寸(1英寸=2.54 cm)金刚石自支撑膜,然后将膜片双面抛光,激光切割成矩形基片,再采用蒸镀法在基片表面制备中心波长在10.6 μm的增透膜,最终制备得到金刚石光学窗口。采用傅里叶红外透射谱、热导仪、爆破试验台测试了金刚石基片镀膜前后的红外透过率、热导率和爆破强度。利用自行搭建的光学平台,测试了CVD金刚石基片增透膜能承受的激光功率密度。结果显示CVD金刚石基片在10.6 μm处的透过率为70.9%,利用光谱计算的吸收系数为0.06 cm^-1,热导率＞19.5 W/(cm·K),爆破强度＞5.62 MPa,镀膜后的透过率为99.2%,增透膜可承受的激光功率密度＞995 W/mm²。

关键词: CVD金刚石, 增透膜, 光学窗口, 高功率CO₂激光器

Abstract: CVD diamond window which can be used in high power CO₂ laser was prepared. Firstly, a 2 inch diameter diamond self-supporting film was deposited by a circumferential antenna ellipsoidal cavity type MPCVD reactor. Then both sides of the film were polished, and the film was cut into rectangular samples by laser. An antireflective film with the central wavelength of 10.6 μm was prepared on the surface of the sample by vacuum evaporation. Finally, the diamond optical window was prepared. In this study, the infrared transmittance before and after coating, thermal conductivity and burst strength of diamond substrate were respectively measured by Fourier transform infrared spectroscopy, thermal conductivity meter and pressure blasting test stand. Using a self-built optical platform, the laser power density that the CVD diamond substrate antireflection coating can withstand was tested. The results show that the transmittance of CVD diamond substrate at 10.6 μm is 70.9%, the absorption coefficient calculated by spectrum is 0.06 cm^-1, the thermal conductivity is more than 19.5 W/(cm·K), the burst strength is more than 5.62 MPa, the transmittance with coating is 99.2%, and the laser power density that the AR coating can withstand>995 W/mm².

Key words: CVD diamond, antireflective coating, optical window, high power CO₂ laser

中图分类号:

O734

安晓明, 葛新岗, 刘晓晨, 李义锋, 姜龙, 罗海瀚. 高功率CO₂激光器CVD金刚石窗口制备研究[J]. 人工晶体学报, 2021, 50(6): 1010-1015.

AN Xiaoming, GE Xingang, LIU Xiaochen, LI Yifeng, JIANG Long, LUO Haihan. Preparation of CVD Diamond Window for High Power CO₂ Laser[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2021, 50(6): 1010-1015.

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高功率CO₂激光器CVD金刚石窗口制备研究

Preparation of CVD Diamond Window for High Power CO₂ Laser

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