化学气相沉积(CVD)金刚石研究现状和发展趋势

摘要/Abstract

摘要： 化学气相沉积(CVD)技术的发展使得金刚石优异的综合性能得以充分发挥,在诸多领域获得应用,并有可能实现跨越式的发展。色心使得金刚石量子加速器初步显示了巨大可行性,包括紫外激光写入窗口等诸多应用场景将金刚石的光、电、热和力学综合优势发挥到了极致,超宽禁带金刚石半导体应用将很快实现,金刚石的散热应用也在不断拓展。本文在总结CVD金刚石的制备方法和性能特点的基础上,根据金刚石的本征特点和应用领域,将其分为量子级、电子级、光学级、热学级和力学级五类,对各类金刚石的研究和应用状况进行了详细阐述,进一步明晰CVD金刚石目前的发展状态,对研判其未来发展趋势有重要意义。

关键词: 化学气相沉积, 金刚石, 色心, 超宽禁带, 散热, 超硬材料

Abstract: Chemical vapor deposition (CVD) technology has enabled synthetic diamonds to be applied in many fields, in which the excellent comprehensiveness of diamond has been fully developed, and may lead to a leap-forward development. The color center makes the diamond quantum accelerator initially show the feasibility of great power. Various scenarios, including the application of UV laser writing technology windows, maximize the comprehensive advantages of diamond windows in terms of optics, electricity, heat and mechanics. Ultra-wide bandgap diamond semiconductor applications will soon be realized, and diamond heat dissipation applications are constantly expanding. By summarizing the preparation methods and characteristics of CVD diamond, according to the intrinsic characteristics of diamond, CVD diamond is classified into quantum grade, electronic grade, optical grade, thermal grade and mechanical grade. The current status of research and application of CVD diamond are reviewed in detail, which is of great significance for judging the future development trend of CVD diamond.

Key words: chemical vapor deposition, diamond, color center, ultra-wide bandgap, heat dissipation, superhard material

中图分类号:

TQ163

李成明, 任飞桐, 邵思武, 牟恋希, 张钦睿, 何健, 郑宇亭, 刘金龙, 魏俊俊, 陈良贤, 吕反修. 化学气相沉积(CVD)金刚石研究现状和发展趋势[J]. 人工晶体学报, 2022, 51(5): 759-780.

LI Chengming, REN Feitong, SHAO Siwu, MU Lianxi, ZHANG Qinrui, HE Jian, ZHENG Yuting, LIU Jinlong, WEI Junjun, CHEN Liangxian, LYU Fanxiu. Progress of Chemical Vapor Deposition (CVD) Diamond[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(5): 759-780.

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