CVD人造金刚石核辐射探测器研究进展

人工晶体学报 ›› 2022, Vol. 51 ›› Issue (5): 814-829.

CVD人造金刚石核辐射探测器研究进展

牟恋希¹, 曾翰森¹, 朱肖华¹, 屠菊萍¹, 刘金龙^1,2, 陈良贤¹, 魏俊俊^1,2, 李成明^1,2, 欧阳晓平³

1.北京科技大学新材料技术研究院,北京 100083;
2.北京科技大学顺德研究生院,佛山 528300;
3.湘潭大学材料科学与工程学院,湘潭 411105

收稿日期:2022-03-02 出版日期:2022-05-15 发布日期:2022-06-17
通讯作者: 刘金龙,博士,副研究员。E-mail:liujinlong@ustb.edu.cn;李成明,博士,教授。E-mail:chengmli@mater.ustb.edu.cn
作者简介:牟恋希(1999—),女,青海省人,硕士研究生。E-mail:mulianxi2021@163.com; 刘金龙,博士,北京科技大学新材料技术研究院副研究员、硕士生导师。兼任《人工晶体学报》《表面技术》《金刚石与磨料磨具工程》等期刊青年编委。主要研究方向为功能碳材料制备与应用研究。承担科技部、国家自然科学基金委、国防科工局等部门国家级项目。开展了包括高质量单晶金刚石生长、探测器应用、金刚石微波功率器件、多晶金刚石微波窗口、X射线窗口等研究工作。荣获教育部技术发明一等奖、北京市科学技术三等奖。李成明,北京科技大学教授,主要从事CVD金刚石膜与CVD金刚石单晶制备及其功能应用研究。先后主持和参与国家重大专项(子项目)、国家重点研发计划、国际政府间合作项目欧洲地平线计划2020、国家“863”计划、国家“973”计划、国家自然科学基金等项目30多项。发表学术论文300余篇,授权国家发明专利70余项。主持研究的金刚石扩热板应用于北斗卫星系列,获得2019年教育部技术发明一等奖。获得其他省部级奖3项。
基金资助:
国家磁约束核聚变发展研究专项(2019YFE03100200);北京自然科学基金(4192038);中央高校基本科研业务费(FRF-GF-20-29B);核探测与核电子学国家重点实验室项目(SKLDPE-KF-202202)

Research Progress of Nuclear Radiation Detectors with CVD Synthetic Diamond

MU Lianxi¹, ZENG Hansen¹, ZHU Xiaohua¹, TU Juping¹, LIU Jinlong^1,2, CHEN Liangxian¹, WEI Junjun^1,2, LI Chengming^1,2, OUYANG Xiaoping³

1. Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China;
2. Shunde Graduate School, University of Science and Technology Beijing, Foshan 528300, China;
3. School of Materials Science and Engineering, Xiangtan University, Xiangtan 411105, China

Received:2022-03-02 Online:2022-05-15 Published:2022-06-17

摘要/Abstract

摘要： 金刚石探测器具有体积小、抗辐照能力强、时间响应快等优点,在核辐射领域应用优势显著。早期金刚石核辐射探测器均采用天然金刚石材料,化学气相沉积(chemical vapor deposition, CVD)金刚石人工合成技术的进步,极大地促进了金刚石核辐射探测器的发展与应用。本文从CVD人造金刚石材料入手,分析了制约金刚石探测器性能的杂质与缺陷、CVD金刚石的合成工艺、探测器级金刚石中杂质与缺陷的表征方法,并基于载流子迁移率与寿命乘积、探测器的电荷收集效率等性能指标,总结了CVD金刚石中的杂质与缺陷对探测器性能的影响规律,介绍了国外金刚石核辐射探测器的应用现状并展望了国内金刚石核辐射探测器的发展前景。

关键词: 金刚石, 核辐照探测器, CVD, 杂质, 缺陷, 载流子迁移率, 能量分辨率

Abstract: Owing to their small volume, strong radiation resistance and fast time response, diamond detectors show the obvious advantage of application in nuclear radiation area. At early stage, diamond nuclear radiation detectors were made of natural diamond materials. With the development of chemical vapor deposition (CVD) diamond synthetic technology, the development and application of diamond radiation detector has been greatly promoted. In this paper, starting with the CVD synthetic diamond material, the impurities and defects that restrict the performance of diamond detectors, the synthetic process of CVD diamond, the characterization method of impurities and defects in detector grade diamond are analyzed systematically. Based on the performance indicators such as the product of carrier mobility and life, the charge collection efficiency of detector, etc., the effects of impurities and defects in CVD diamond on the performance of the detector are summarized. The application status of diamond nuclear radiation detectors abroad is introduced and the development prospect of domestic diamond nuclear radiation detectors is also viewed.

Key words: diamond, nuclear radiation detector, CVD, impurity, defect, carrier mobility, energy resolution

中图分类号:

TL814

牟恋希, 曾翰森, 朱肖华, 屠菊萍, 刘金龙, 陈良贤, 魏俊俊, 李成明, 欧阳晓平. CVD人造金刚石核辐射探测器研究进展[J]. 人工晶体学报, 2022, 51(5): 814-829.

MU Lianxi, ZENG Hansen, ZHU Xiaohua, TU Juping, LIU Jinlong, CHEN Liangxian, WEI Junjun, LI Chengming, OUYANG Xiaoping. Research Progress of Nuclear Radiation Detectors with CVD Synthetic Diamond[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(5): 814-829.

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