纳米金刚石薄膜的掺杂、表/界面调控及性能研究

人工晶体学报 ›› 2022, Vol. 51 ›› Issue (5): 865-874.

纳米金刚石薄膜的掺杂、表/界面调控及性能研究

胡晓君, 郑玉浩, 陈成克, 鲁少华, 蒋梅燕, 李晓

浙江工业大学材料科学与工程学院,杭州 310014

收稿日期:2022-02-21 出版日期:2022-05-15 发布日期:2022-06-17
作者简介:胡晓君(1974—),女,四川省人,博士,教授。E-mail:huxj@zjut.edu.cn; 胡晓君,教授,博导,浙江工业大学材料科学与工程学院副院长,浙江省青年科技工作者协会副会长、浙江省材料研究学会理事,浙江省女科技工作者协会理事。浙江-俄罗斯金刚石薄膜及功能器件联合研究中心负责人、浙江省量子信息与智能材料国际科技合作基地负责人。长期在金刚石薄膜等低维超硬功能材料、纳米碳材料和计算材料学等方面开展工作,探索金刚石薄膜等材料的掺杂新方法及光电性能,致力于获得新颖的光电器件。主持了国家自然科学基金联合重点项目、国家国际科技合作项目、国家重点研发计划项目子课题、国家自然科学基金、浙江省重点研发计划等科研项目14项。在PNAS、APL、Carbon、Nanoscale等国内外期刊发表论文80余篇;以第一发明人授权发明专利25项,其中授权国际专利1项。
基金资助:
国家自然科学基金联合重点项目(U1809210);国家重点研发计划(2016YFE0133200);国家国际科技合作计划(2014DFR51160);浙江省重点研发计划一带一路国际合作项目(2018C04021);国家自然科学基金(50972129,50602039,11504325,52002351,52102052);浙江省自然科学基金(LQ15A040004,LY18E020013,LGC21E020001)

Doping, Surface/Interface Regulation and Properties of Nanocrystalline Diamond Films

HU Xiaojun, ZHENG Yuhao, CHEN Chengke, LU Shaohua, JIANG Meiyan, LI Xiao

College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China

Received:2022-02-21 Online:2022-05-15 Published:2022-06-17

摘要/Abstract

摘要： 本文综述了近年来国内外研究者在纳米金刚石薄膜的掺杂、导电性能、场发射性能和电化学性能等方面的工作,涉及化学气相沉积法制备n型纳米金刚石薄膜,离子注入掺杂纳米金刚石晶粒提高薄膜的n型导电性能,金属离子注入制备场发射性能良好的纳米金刚石薄膜,低剂量离子注入和晶粒表面氧终止态获得高迁移率n型电导,纳米金刚石/石墨烯复合结构的调控对其电学及电化学性能的影响,以及硼掺杂金刚石薄膜电极的微结构和电化学性能研究等。综合分析发现,晶粒掺杂和表界面协同调控可以提升薄膜的电学性能、场发射性能及电化学性能,为纳米金刚石薄膜在纳米电子器件、电化学电极等领域的应用提供了理论基础。

关键词: 纳米金刚石薄膜, 掺杂, 表面态, 电学性能, n型电导, p型电导

Abstract: In this paper, doping, electric conductivity, field emission and electrochemical properties of nanocrystalline diamond films are reviewed, which contain n-type nanocrystalline diamond (NCD) films prepared by chemical vapor deposition, improvement of n-type electrical conductivity in NCD films by ion implantation, excellent field emission properties of NCD films prepared by metal ion implantation, high mobility n-type conductivity obtained by low dose ion implantation and oxygen termination on grain surface, regulation of the structure of NCD/graphene and its influence on electrical and electrochemical properties, microstructure and electrochemical regulation of boron-doped NCD film electrodes and so on. It shows through comprehensive analysis that grain doping and surface/interface coordination can improve the electrical properties, field emission properties and electrochemical properties of thin films, which has important application prospects in the fields of diamond-based nano-electronic devices and electrochemical electrodes.

Key words: nanocrystalline diamond film, doping, surface state, electrical property, n-type conductivity, p-type conductivity

中图分类号:

TB383.2

胡晓君, 郑玉浩, 陈成克, 鲁少华, 蒋梅燕, 李晓. 纳米金刚石薄膜的掺杂、表/界面调控及性能研究[J]. 人工晶体学报, 2022, 51(5): 865-874.

HU Xiaojun, ZHENG Yuhao, CHEN Chengke, LU Shaohua, JIANG Meiyan, LI Xiao. Doping, Surface/Interface Regulation and Properties of Nanocrystalline Diamond Films[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2022, 51(5): 865-874.

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