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人工晶体学报 ›› 2022, Vol. 51 ›› Issue (5): 926-932.

• 研究论文 • 上一篇    下一篇

基于光谱测试的纯净金刚石品质与缺陷研究

张宇飞1, 王凯悦2, 李俊林1, 秦振兴1, 田玉明3   

  1. 1.太原科技大学应用科学学院,太原 030024;
    2.太原科技大学材料科学与工程学院,太原 030024;
    3.山西科技学院材料科学与工程学院,晋城 048026
  • 收稿日期:2022-03-08 出版日期:2022-05-15 发布日期:2022-06-17
  • 通讯作者: 王凯悦,博士,教授。E-mail:wangkaiyue8@163.com
  • 作者简介:张宇飞(1992—),男,山西省人,博士,讲师。E-mail:2021026@tyust.edu.cn; 王凯悦,太原科技大学材料科学与工程学院教授、博士生导师,山西省关键基础材料协同创新中心负责人,兼任山西省硅酸盐学会常务理事、副秘书长,长期从事半导体晶片外延生长与缺陷调控等领域研究。天津大学与英国布里斯托大学联合培养博士,西安交通大学博士后,曾先后在美国加州大学欧文分校、河滨分校、加州州立大学做访问学者。主持完成国家自然科学基金委联合基金子课题、国家青年基金、中国博士后基金面上一等资助、特别资助等项目16项,在Appl Phys Lett等期刊上发表论文30余篇,授权国家发明专利5项,出版教材和专著各1部;曾获山西省高校教学名师、山西省优秀硕士学位论文指导教师等荣誉称号。
  • 基金资助:
    太原科技大学科研启动金资助(20222005);山西省高等学校科技创新资助(2021L298); 山西省重点研发计划(201903D321111);国家自然科学基金(51502189);山西省“1331工程”重点创新团队(1331KIRT)

Spectroscopy Characterization Study on Quality and Defects of Pure Diamond

ZHANG Yufei1, WANG Kaiyu2, LI Junlin1, QIN Zhenxing1, TIAN Yuming3   

  1. 1. School of Applied Science, Taiyuan University of Science and Technology, Taiyuan 030024, China;
    2. School of Materials Science and Engineering, Taiyuan University of Science and Technology, Taiyuan 030024, China;
    3. School of Material Science and Engineering, Shanxi Institute of Science and Technology, Jincheng 048026, China
  • Received:2022-03-08 Online:2022-05-15 Published:2022-06-17

摘要: 本文利用低温拉曼与光致发光光谱对纯净金刚石晶片的结晶质量、晶体应力分布进行表征分析,并结合电子辐照和快速退火对晶片的杂质缺陷结构开展研究。通过拉曼光谱对金刚石特征峰的表征分析发现,由于金刚石生长机制以及晶片的切割、抛光等因素影响,晶片的边缘与表面应力分布较高。光致发光光谱中的零声子线具有明显的温度依赖性,根据Jahn-Teller效应与电子-声子耦合理论阐明了测试温度变化引起中性单空位缺陷零声子线分裂与红移的机理。对晶片做电子辐照与退火调控处理后,晶片中氮-空位(NV)缺陷显著增多,表明在纯净晶片中氮主要以替代位氮杂质的形式存在。

关键词: 金刚石, 光谱表征, 晶体缺陷, 色心, 电子辐照, 退火

Abstract: In this paper, the low-temperature Raman and photoluminescence (PL) spectroscopy were employed to study the crystallization degree, stress distribution of the pure diamond film. Combined with electron irradiation and rapid annealing, the impurity defect structure of the pure diamond film was studied. Raman spectroscopy analysis shows that the stress distributions in edge and surface of the film are higher than in interior, which may be ascribed to the diamond growth mechanism, physical cutting and polishing damage to the films. The zero phonon lines in PL spectra show obvious temperature dependent, and the spectra peaks redshift, intensity reduction and low-temperature splitting with increase of temperature were explained by Jahn-Teller effect and electron-phonon coupling theory. Low temperature PL spectra observed distinct NV defects in the film after electron irradiation and 700 ℃ annealing,which indicate that the nitrogen mainly existed in the lattice with a form of substitution impurities.

Key words: diamond, spectral characterization, crystal defect, color center, electron irradiation, annealing

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