大尺寸碳化硅晶体生长热-质输运过程建模及数值仿真

摘要/Abstract

摘要： 碳化硅(SiC)电子器件的性能和成本受衬底质量影响,因此生长大直径高品质SiC单晶意义重大。物理气相传输(PVT)法是一种常用的生长方法,但其主要面临热场设计与气流控制问题。本工作对电阻加热PVT法生长150 mm SiC单晶完整过程开展数值仿真研究,建立描述SiC原料热解和再结晶及其多孔结构演变、热-质输运、晶体形貌变化的数理模型,用数值模拟手段研究晶体生长、原料演变与热场变化等过程间的耦合关系。结果显示:原料区侧面高温导致气流不均匀,晶面呈“W”形,原料区底部高温得到均匀气流和微凸晶面;长晶界面通过径向温度变化调节气相组分平衡压力,使晶面生长成等温线形状;晶体生长速率与原料温度、剩余原料量呈正相关。模拟结果与已报道实验结果吻合,对优化生长SiC单晶有指导意义。

关键词: SiC单晶, 单晶生长, 热-质输运, 数学模型, 电阻加热, 物理气相传输

Abstract: The functionality and performance of the electronic product are heavily dependent on its quality of power device and radio frequency device, thus further determined by the quality of SiC substrate. Hence, the manufacturing of superior SiC single crystal is of significant importance. One popular way of growing large-diameter SiC single crystal is to leverage physical vapor transport (PVT) method. However, this method admits a common challenge in thermal design and flow control. To tackle this problem, a numerical simulation study of the complete process of growing 150 mm SiC single crystal by resistive heating PVT method was proposed in this paper. A mathematical model to capture the growing process, which comprises the pyrolysis and recrystallization of source materials, the porous structure evolution, the heat-mass transport in the system, and the morphology changes of crystal growth front was established. In order to validate our developed model, the numerical simulations were implemented to study the interaction among the crystal growth, the consumption of source materials, and the thermal field changes. The results show that the high temperature on the side of the source area leads to uneven gas flow, and the high temperature at the bottom results in a uniform airflow and a slightly convex crystal surface. Meanwhile, the growth interface adjusts the equilibrium pressure of the gas species through the radial temperature distribution, therefore, the crystal surface grows into an isotherm shape. In addition, the crystal growth rate is positively correlated with the temperature of the source area and the amount of remaining raw materials. The simulation results are consistent with the reported experimental results inherently, which lay a solid foundation for the optimal growth of large-scale and high-quality SiC single crystals.

Key words: SiC single crystal, crystal growth, heat-mass transport, mathematical model, resistive heating, physical vapor transport

中图分类号:

O782
TQ163

卢嘉铮, 张辉, 郑丽丽, 马远. 大尺寸碳化硅晶体生长热-质输运过程建模及数值仿真[J]. 人工晶体学报, 2023, 52(4): 550-561.

LU Jiazheng, ZHANG Hui, ZHENG Lili, MA Yuan. Modeling and Numerical Simulation of Heat-Mass Transport Process for Large-Size Silicon Carbide Crystal Growth[J]. Journal of Synthetic Crystals, 2023, 52(4): 550-561.

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