BaTiO3薄膜的制备及其在电光调制器的应用

摘要/Abstract

摘要： BaTiO₃凭借其较高的电光系数、优良的压电性质和非线性光学性质,成为制备高性能电光调制器的关键材料。其制备方法、实验条件和衬底的选择等决定了薄膜的质量、生长取向和电光系数等,进而影响电光调制器的传播损耗、半波电压、消光比等性能。本文从电光调制器的工作原理出发,围绕BaTiO₃薄膜的制备方法、实验条件和薄膜衬底等,探讨了成膜的取向和质量的影响因素,分析了各个BaTiO₃薄膜制备方法的优缺点,论述了波导的结构及参数,并展望了未来优化BaTiO₃薄膜制备和波导制作工艺的方向。

关键词: BaTiO₃薄膜, 电光调制器, 波导, 电光系数, 化学气相沉积法, 分子束外延法

Abstract: BaTiO₃ has become the key materials for the preparation of high-performance electro-optical modulators due to its high electro-optical coefficient, excellent piezoelectric properties and nonlinear optical properties. The quality, growth orientation and electro-optic coefficient of the film are determined by the preparation method, experimental condition and the selection of substrate, and further affecting the propagation loss, half-wave voltage and extinction ratio of the electro-optical modulator. Based on the working principle of electro-optical modulator, the factors affecting the orientation and quality of film forming were discussed by focusing on the preparation methods, experimental conditions and film substrates of BaTiO₃ thin film in this paper. The advantages and disadvantages of each process of BaTiO₃ thin film preparation were analyzed, the structure and performance of waveguide were discussed. Finally, the direction of optimizing BaTiO₃ thin film fabrication and waveguide fabrication process in the future were summarized in this paper.

Key words: BaTiO₃ thin film, electro-optic modulator, waveguide, electro-optic coefficient, chemical vapor deposition method, molecular beam epitaxy method

中图分类号:

O484
O439

任怡静, 马新国, 张锋, 陆晶晶, 张力, 王晗. BaTiO₃薄膜的制备及其在电光调制器的应用[J]. 人工晶体学报, 2023, 52(4): 688-700.

REN Yijing, MA Xinguo, ZHANG Feng, LU Jingjing, ZHANG Li, WANG Han. Preparation of BaTiO₃ Thin Film and Its Application in Electro-Optic Modulator[J]. Journal of Synthetic Crystals, 2023, 52(4): 688-700.

参考文献

[1] REIS J D, SHUKLA V, STAUFFER D R, et al. Technology options for 400G implementation[C]//Optical Networking Forum (OIF), OIF-Tech-Options-400G-01.0, 2015.
[2] DOUGHERTY G, MARGAN P. OCLARO. Photothermal switching with light absorbers for silicon-based devices[C]//The 29th annual ROTH conference presentations, 2017.
[3] 秦妍妍, 吴立枢, 陈泽贤, 等. 薄膜铌酸锂电光调制器研究进展[J]. 光电子技术, 2021, 41(3): 159-166.
QIN Y Y, WU L S, CHEN Z X, et al. Research progress of thin-film lithium niobate electro-optic modulators[J]. Optoelectronic technology, 2021, 41(3): 159-166(in Chinese).
[4] ABEL S, ELTES F, ORTMANN J E, et al. Large Pockels effect in micro- and nanostructured barium titanate integrated on silicon[J]. Nature Materials, 2019, 18(1): 42-47.
[5] KIM I D, AVRAHAMI Y, SOCCI L, et al. Ridge waveguide using highly oriented BaTiO₃ thin films for electro-optic application[J]. Journal of Asian Ceramic Societies, 2014, 2(3): 231-234.
[6] LIN W J, TSENG T Y, LU H B, et al. Growth and ferroelectricity of epitaxial-like BaTiO₃ films on single-crystal MgO, SrTiO₃, and silicon substrates synthesized by pulsed laser deposition[J]. Journal of Applied Physics, 1995, 77(12): 6466-6471.
[7] CAI W, FAN Y Z, GAO J C, et al. Microstructure, dielectric properties and diffuse phase transition of barium stannate titanate ceramics[J]. Journal of Materials Science: Materials in Electronics, 2011, 22(3): 265-272.
[8] HWANG J, KOLODIAZHNYI T, YANG J, et al. Doping and temperature-dependent optical properties of oxygen-reduced BaTiO_3-δ[J]. Physical Review B, 2010, 82(21): 214109.
[9] LI Y W, LI F X. The effect of domain patterns on 180° domain switching in BaTiO₃ crystals during antiparallel electric field loading[J]. Applied Physics Letters, 2014, 104(4): 042908.
[10] HE D Y, XING X R, QIAO L J, et al. Temperature change effect on BaTiO₃ single crystal surface potential around domain walls[J]. Applied Surface Science, 2014, 311: 837-841.
[11] YANG Q, ZHANG W, YUAN M L, et al. Preparation and characterization of self-assembled percolative BaTiO₃-CoFe₂O₄ nanocomposites via magnetron co-sputtering[J]. Science and Technology of Advanced Materials, 2014, 15(2): 025003.
[12] HU Z G, WANG G S, HUANG Z M, et al. Structure-related infrared optical properties of BaTiO₃ thin films grown on Pt/Ti/SiO₂/Si substrates[J]. Journal of Physics and Chemistry of Solids, 2003, 64(12): 2445-2450.
[13] ZHANG W, HU F R, ZHANG H, et al. Investigation of the electrical properties of RF sputtered BaTiO₃ films grown on various substrates[J]. Materials Research Bulletin, 2017, 95: 23-29.
[14] ZHANG W, HU F R. Effects of substrate-controlled-orientation on the electrical performance of sputtered BaTiO₃ thin films[J]. Journal of Vacuum Science & Technology B, 2020, 38(1): 012208.
[15] 孙翔宇. 钛酸钡晶体薄膜波导的优化设计及加工技术的研究[D]. 长春: 长春理工大学, 2018.
SUN X Y. Investigation for the optimal design and fabrication technology of BaTiO₃ crystal thin-film waveguides[D]. Changchun: Changchun University of Science and Technology, 2018 (in Chinese).
[16] ZHAO Y Y, OUYANG J. Columnar nanograined BaTiO₃ ferroelectric thin films integrated on Si with a sizable dielectric tunability[J]. Journal of Inorganic Materials, 2022, 37(6): 596.
[17] 张静, 付秀华, 杨飞, 等. BaTiO₃晶体薄膜PLD法生长工艺参量研究[J]. 光子学报, 2014, 43(5): 77-81.
ZHANG J, FU X H, YANG F, et al. Growth process parameters of BaTiO₃ crystal thin film in PLD method[J]. Acta Photonica Sinica, 2014, 43(5): 77-81 (in Chinese).
[18] WEI X, HUANG W, JIE W, et al. Orientation growth of BaTiO₃ ferroelectric films on the substrates of silicon[J]. Journal of the Chinese Ceramic Society, 2007, 35(5): 583-587.
[19] 彭静. 钛酸钡系铁电薄膜的制备及光学和光电行为研究[D]. 武汉: 武汉大学, 2013.
PENG J. A study on the fabrication, optical and optoelectronic behavior of Barium titanate-based ferroelectric thin films[D]. Wuhan: Wuhan University, 2013 (in Chinese).
[20] 马玲, 沈小丰, 王杰. 电光调制系统设计[J]. 电子工程师, 2007, 33(3): 38-39+58.
MA L, SHEN X F, WANG J. Design of electro-optic modulation system[J]. Electronic Engineer, 2007, 33(3): 38-39+58 (in Chinese).
[21] KORMONDY K J, POPOFF Y, SOUSA M, et al. Microstructure and ferroelectricity of BaTiO₃ thin films on Si for integrated photonics[J]. Nanotechnology, 2017, 28(7): 075706.
[22] TANG P S, TOWNER D J, HAMANO T, et al. Electrooptic modulation up to 40 GHz in a Barium titanate thin film waveguide modulator[J]. Optics Express, 2004, 12(24): 5962-5967.
[23] TANG P S, MEIER A L, TOWNER D J, et al. BaTiO₃ thin-film waveguide modulator with a low voltage-length product at near-infrared wavelengths of 0.98 and 1.55 μm[J]. Optics Letters, 2005, 30(3): 254-256.
[24] ELTES F, MAI C, CAIMI D, et al. A BaTiO₃-based electro-optic pockels modulator monolithically integrated on an advanced silicon photonics platform[J]. Journal of Lightwave Technology, 2019, 37(5): 1456-1462.
[25] KORMONDY K J, ABEL S, FALLEGGER F, et al. Analysis of the Pockels effect in ferroelectric barium titanate thin films on Si(001)[J]. Microelectronic Engineering, 2015, 147: 215-218.
[26] XIONG C, PERNICE W H P, NGAI J H, et al. Active silicon integrated nanophotonics: ferroelectric BaTiO₃ devices[J]. Nano Letters, 2014, 14(3): 1419-1425.
[27] CASTERA P, GUTIERREZ A M, TULLI D, et al. Electro-optical modulation based on pockels effect in BaTiO₃ with a multi-domain structure[J]. IEEE Photonics Technology Letters, 2016, 28(9): 990-993.
[28] POSADAS A B, PARK H, REYNAUD M, et al. Thick BaTiO₃ epitaxial films integrated on Si by RF sputtering for electro-optic modulators in Si photonics[J]. ACS Applied Materials & Interfaces, 2021, 13(43): 51230-51244.
[29] LIU X, WU C, ZHANG P. Comparison of two-step growth and direct growth for GaAs on Si[J]. Semiconductor Optoelectronics,2002, 23(2):128-131.
[30] TOWNER D, NI J, MARKS T, et al. Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO₃ thin films[J]. Journal of Crystal Growth, 2003, 255(1): 107-113.
[31] TEREN A R, BELOT J A, EDLEMAN N L, et al. MOCVD of epitaxial BaTiO₃ films using a liquid Barium precursor[J]. Chemical Vapor Deposition, 2000, 6(4): 175-177.
[32] QIU J H, DING J N, YUAN N Y, et al. Film thickness dependence of electro-optic effect in epitaxial BaTiO₃ thin films[J]. Solid State Communications, 2011, 151(19): 1344-1348.
[33] SHUSTER G, KREININ O, LAKIN E, et al. MOCVD growth of barium-strontium titanate films using newly developed barium and strontium precursors[J]. Thin Solid Films, 2010, 518(16): 4658-4661.
[34] REINKE M, KUZMINYKH Y, HOFFMANN P. Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO₃[J]. Physica Status Solidi (a), 2015, 212(7): 1556-1562.
[35] REINKE M, KUZMINYKH Y, ELTES F, et al. Low temperature epitaxial barium titanate thin film growth in high vacuum CVD[J]. Advanced Materials Interfaces, 2017, 4(18): 1700116.
[36] PETRARU A, SCHUBERT J, SCHMID M, et al. Ferroelectric BaTiO₃ thin-film optical waveguide modulators[J]. Applied Physics Letters, 2002, 81(8): 1375-1377.
[37] PETRARU A, SCHUBERT J, SCHMID M, et al. Integrated optical Mach Zehnder modulator based on polycrystalline BaTiO₃[J]. Optics Letters, 2003, 28(24): 2527-2529.
[38] VAKULOV Z, KORZUN K, TOMINOV R V, et al. Formation of nanocrystalline BaTiO₃ thin films by pulsed laser deposition[C]//Proc SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 2022, 12157: 413-419.
[39] LYU J K, FINA I, SOLANAS R, et al. Tailoring lattice strain and ferroelectric polarization of epitaxial BaTiO₃ thin films on Si(001)[J]. Scientific Reports, 2018, 8(1): 1-10.
[40] BEHERA S, KHARE A. Influence of substrate temperature and oxygen pressure on the structural and optical properties of polycrystalline BaTiO₃ thin films grown by PLD[J]. Materials Science in Semiconductor Processing, 2022, 140: 106379.
[41] HSU M H M, MARINELLI A, MERCKLING C, et al. Orientation-dependent electro-optical response of BaTiO₃ on SrTiO₃-buffered Si(001) studied via spectroscopic ellipsometry[J]. Optical Materials Express, 2017, 7(6): 2030-2039.
[42] HILTUNEN J, SENEVIRATNE D, SUN R, et al. Optical properties of BaTiO₃ thin films: influence of oxygen pressure utilized during pulsed laser deposition[J]. Journal of Electroceramics, 2009, 22(4): 416-420.
[43] ESTRADA F R, DE MORAES L G M, VITAL F L A, et al. Island growth mode in pulsed laser deposited ferroelectric BaTiO₃ thin films: the role of oxygen pressure during deposition[J]. Ferroelectrics, 2019, 545(1): 39-44.
[44] LYU J K, ESTANDÍA S, GAZQUEZ J, et al. Control of polar orientation and lattice strain in epitaxial BaTiO₃ films on silicon[J]. ACS Applied Materials & Interfaces, 2018, 10(30): 25529-25535.
[45] WANG T H, HSU P C, KORYTOV M, et al. Polarization control of epitaxial barium titanate (BaTiO₃) grown by pulsed-laser deposition on a MBE-SrTiO₃/Si(001) pseudo-substrate[J]. Journal of Applied Physics, 2020, 128(10): 104104.
[46] 罗梦希. BaTiO₃晶体薄膜波导电光特性研究[D]. 长春: 长春理工大学, 2020.
LUO M X. Research on electro-optic characteristics of BaTiO₃ crystal thin film waveguide[D]. Changchun: Changchun University of Science and Technology, 2020 (in Chinese).
[47] 董艺. BaTiO₃薄膜的制备及光电性能研究[D]. 桂林: 桂林电子科技大学, 2021.
DONG Y. The preparation of BaTiO₃ thin film and its photoelectric properties[D]. Guilin: Guilin University of Electronic Technology, 2021 (in Chinese).
[48] ZHANG W, YUAN M L, WANG X Y, et al. Highly C-axis oriented Barium titanate ferroelectric films deposited on SrTiO₃ substrate using an off-axis sputtered conductive oxide layer as bottom electrode[J]. Advanced Materials Research, 2011, 399/400/401: 926-929.
[49] SHIH W C, LIANG Y S, WU M S. Preparation of BaTiO₃ Films on Si substrate with MgO buffer layer by RF magnetron sputtering[J]. Japanese Journal of Applied Physics, 2008, 47(9): 7475-7479.
[50] WANG L Q, KANG H M, LI K Y, et al. Phase evolution of BaTiO₃ nanoparticles: an identification of BaTi₂O₅ intermediate phase in calcined stearic acid gel[J]. The Journal of Physical Chemistry C, 2008, 112(7): 2382-2388.
[51] LI W, XU Z J, CHU R Q, et al. Structure and electrical properties of BaTiO₃ prepared by sol-gel process[J]. Journal of Alloys and Compounds, 2009, 482(1/2): 137-140.
[52] WANG W W, CAO L X, LIU W, et al. Low-temperature synthesis of BaTiO₃ powders by the sol-gel-hydrothermal method[J]. Ceramics International, 2013, 39(6): 7127-7134.
[53] CHINCHAMALATPURE V R, GHOSH S A, CHAUDHARI G N. Synthesis and electrical characterization of BaTiO₃ thin films on Si(100)[J]. Materials Sciences and Applications, 2010, 1(4): 187-190.
[54] EDMONDSON B I, KWON S, LAM C H, et al. Epitaxial, electro-optically active Barium titanate thin films on silicon by chemical solution deposition[J]. Journal of the American Ceramic Society, 2020, 103(2): 1209-1218.
[55] EDMONDSON B I, KWON S, ORTMANN J E, et al. Composition and annealing effects on the linear electro-optic response of solution-deposited Barium strontium titanate[J]. Journal of the American Ceramic Society, 2020, 103(10): 5700-5705.
[56] ABEL S. Electro-optic photonic devices based on epitaxial barium titanate thin films on silicon[D]. Grenoble: Université Grenoble Alpes Doctoral Dissertation, 2014.
[57] TSURUMI T, MIYASOU T, ISHIBASHI Y, et al. Preparation and dielectric property of BaTiO₃-SrTiO₃ artificially modulated structures[J]. Japanese Journal of Applied Physics, 1998, 37(9S): 5104.
[58] MERCKLING C, KORYTOV M, CELANO U, et al. Epitaxial growth and strain relaxation studies of BaTiO₃ and BaTiO₃/SrTiO₃ superlattices grown by MBE on SrTiO₃-buffered Si(001) substrate[J]. Journal of Vacuum Science & Technology A, 2019, 37(2): 021510.
[59] IZUHARA T, GHEORMA I L, OSGOOD R M, et al. Single-crystal Barium titanate thin films by ion slicing[J]. Applied Physics Letters, 2003, 82(4): 616-618.
[60] SULSER F, POBERAJ G, KOECHLIN M, et al. Photonic crystal structures in ion-sliced lithium niobate thin films[J]. Optics Express, 2009, 17(22): 20291-20300.
[61] 刘海锋, 郭宏杰, 谭满清, 等. 铌酸锂薄膜调制器的研究进展[J]. 中国光学, 2022, 15(1): 1-13.
LIU H F, GUO H J, TAN M Q, et al. Research progress of lithium niobate thin-film modulators[J]. Chinese Optics, 2022, 15(1): 1-13 (in Chinese).
[62] GIROUARD P, CHEN P C, JEONG Y K, et al. χ⁽²⁾ modulator with 40-GHz modulation utilizing BaTiO₃ photonic crystal waveguides[J]. IEEE Journal of Quantum Electronics, 2017, 53(4): 1-10.
[63] ELTES F, KROH M, CAIMI D, et al. A novel 25 Gbps electro-optic Pockels modulator integrated on an advanced Si photonic platform[C]//2017 IEEE International Electron Devices Meeting (IEDM). December 2-6, 2017, San Francisco, CA, USA. IEEE, 2018: 24.5.1-24.5.4.
[64] UMMETHALA S, KEMAL J N, ALAM A S, et al. Hybrid electro-optic modulator combining silicon photonic slot waveguides with high-k radio-frequency slotlines[J]. Optica, 2021, 8(4): 511-519.
[65] ORTMANN J E, ELTES F, CAIMI D, et al. Ultra-low-power tuning in hybrid barium titanate-silicon nitride electro-optic devices on silicon[J]. ACS Photonics, 2019, 6(11): 2677-2684.
[66] ELTES F, CAIMI D, FALLEGGER F, et al. Low-loss BaTiO₃-Si waveguides for nonlinear integrated photonics[J]. ACS Photonics, 2016, 3(9): 1698-1703.
[67] PERNICE W H P, XIONG C, WALKER F J, et al. Design of a silicon integrated electro-optic modulator using ferroelectric BaTiO₃ films[J]. IEEE Photonics Technology Letters, 2014, 26(13): 1344-1347.
[68] CASTERA P, TULLI D, GUTIERREZ A M, et al. Influence of BaTiO₃ ferroelectric orientation for electro-optic modulation on silicon[J]. Optics Express, 2015, 23(12): 15332-15342.
[69] AL-ITHAWI S, HEKMAT W A, HUBEATIR K A, et al. Characterization of bulk BaTiO₃ material for optical modulator applications[J]. Materials Science Forum, 2020, 1002: 132-139.
[70] ELTES F, ORTMANN J E, URBONAS D, et al. Record high pockels coefficient in PIC-compatible BaTiO₃/Si photonic devices[C]//2018 European Conference on Optical Communication (ECOC). September 23-27, 2018, Rome, Italy. IEEE, 2018: 1-3.

BaTiO₃薄膜的制备及其在电光调制器的应用

Preparation of BaTiO₃ Thin Film and Its Application in Electro-Optic Modulator

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