基于亚波长光栅辅助定向耦合器的集成铌酸锂偏振分束器

人工晶体学报 ›› 2024, Vol. 53 ›› Issue (3): 465-471.

• “铌酸锂集成光子学”专栏 • 上一篇下一篇

基于亚波长光栅辅助定向耦合器的集成铌酸锂偏振分束器

陈力, 周旭东, 袁明瑞, 肖恢芙, 田永辉

兰州大学物理科学与技术学院,兰州 730000

收稿日期:2023-12-29 发布日期:2024-04-02
通信作者: 田永辉,博士,教授。E-mail:siphoton@lzu.edu.cn
作者简介:陈力(1998—),男,浙江省人,硕士研究生。E-mail:lchen2021@lzu.edu.cn
基金资助:
甘肃省自然科学基金重点项目(23JRRA1026);甘肃省自然科学基金在站博士后专项项目(23JRRA1126)

Integrated Lithium Niobate Polarization Beam Splitter Based on a Subwavelength Grating-Assisted Directional Coupler

CHEN Li, ZHOU Xudong, YUAN Mingrui, XIAO Huifu, TIAN Yonghui

School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China

Received:2023-12-29 Published:2024-04-02

摘要/Abstract

摘要： 绝缘体上铌酸锂(LNOI)是实现高速光子集成回路(PICs)的理想平台。通过充分利用铌酸锂(LN)的优势,LNOI平台能够实现高速电光和高效非线性光学集成器件。偏振分束器(PBS)作为分离和组合两种正交偏振光模式的关键无源器件之一,在实现片上偏振复用系统并提升光通信系统数据传输容量方面发挥着至关重要的作用。近年来,基于不同结构的PBS已经被成功实现,其中,基于亚波长光栅辅助定向耦合结构的PBS表现出优异的器件性能和紧凑的器件尺寸。本文基于氮化硅-铌酸锂异质集成的间接刻蚀方案,实现了一种亚波长光栅辅助定向耦合结构的高性能PBS。仿真结果表明,当波长在1 500~1 600 nm时,器件的偏振消光比均大于24.49 dB。实验数据进一步证实,当波长在1 500~1 580 nm时,器件偏振消光比均大于18.06 dB。

关键词: 薄膜铌酸锂集成光子学, 氮化硅-铌酸锂, 偏振调控器件, 偏振分束器, 亚波长光栅, 定向耦合器

Abstract: Lithium niobate on insulator (LNOI) is an ideal platform for realizing high-speed photonic integrated circuits (PICs). By taking full advantage of LN, the LNOI platform enables high-speed electro-optic and efficient nonlinear optical integrated devices. The polarization beam splitter (PBS) is one of the key passive devices for separating and combining two orthogonal polarized modes, which is essential for realizing on-chip polarization multiplexing systems and enhancing the data transmission capacity of photonic communication systems. In recent years, PBS has been successfully implemented based on various structures. Among them, the PBS based on subwavelength grating-assisted directional coupling structure stands out due to its excellent device performance and compact size. In this paper, we present a high-performance PBS with a subwavelength grating-assisted directional coupling structure, realized through an indirect etching scheme of silicon nitride-lithium niobate heterogeneous integration. Simulation results show that the device achieves a polarization extinction ratio greater than 24.49 dB in the wavelength range of 1 500 nm to 1 600 nm. Experimental data further confirms that the polarization extinction ratio of the device is greater than 18.06 dB in the wavelength range of 1 500 nm to 1 580 nm.

Key words: thin film lithium niobate integrated photonics, silicon nitride-lithium niobate, polarization control device, polarization beam splitter, subwavelength grating, directional coupler

中图分类号:

TN256
O78

陈力, 周旭东, 袁明瑞, 肖恢芙, 田永辉. 基于亚波长光栅辅助定向耦合器的集成铌酸锂偏振分束器[J]. 人工晶体学报, 2024, 53(3): 465-471.

CHEN Li, ZHOU Xudong, YUAN Mingrui, XIAO Huifu, TIAN Yonghui. Integrated Lithium Niobate Polarization Beam Splitter Based on a Subwavelength Grating-Assisted Directional Coupler[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2024, 53(3): 465-471.

参考文献

[1] ZHU D, SHAO L B, YU M J, et al. Integrated photonics on thin-film lithium niobate[J]. Advances in Optics and Photonics, 2021, 13(2): 242-352.
[2] LUO Q, YANG C, ZHANG R, et al. On-chip erbium-doped lithium niobate microring lasers[J]. Optics Letters, 2021, 46(13): 3275-3278.
[3] ZHANG P, HUANG H J, JIANG Y H, et al. High-speed electro-optic modulator based on silicon nitride loaded lithium niobate on an insulator platform[J]. Optics Letters, 2021, 46(23): 5986-5989.
[4] HAN X, JIANG Y H, FRIGG A, et al. Single-step etched grating couplers for silicon nitride loaded lithium niobate on insulator platform[J]. APL Photonics, 2021, 6(8): 086108.
[5] HAN X, JIANG Y H, FRIGG A, et al. Mode and polarization-division multiplexing based on silicon nitride loaded lithium niobate on insulator platform[J]. Laser & Photonics Reviews, 2022, 16(1): 2100529.
[6] ZHANG Y, HE Y, ZHU Q M, et al. On-chip silicon polarization and mode handling devices[J]. Frontiers of Optoelectronics, 2018, 11(1): 77-91.
[7] LIU L, DENG Q Z, ZHOU Z P. Manipulation of beat length and wavelength dependence of a polarization beam splitter using a subwavelength grating[J]. Optics Letters, 2016, 41(21): 5126-5129.
[8] GUAN X W, WU H, SHI Y C, et al. Ultracompact and broadband polarization beam splitter utilizing the evanescent coupling between a hybrid plasmonic waveguide and a silicon nanowire[J]. Optics Letters, 2013, 38(16): 3005-3008.
[9] DAI D X, WANG Z, BOWERS J E. Considerations for the design of asymmetrical mach-zehnder interferometers used as polarization beam splitters on a submicrometer silicon-on-insulator platform[J]. Journal of Lightwave Technology, 2011, 29(12): 1808-1817.
[10] YUAN M R, HAN X, XIAO H F, et al. Integrated lithium niobate polarization beam splitter based on a photonic-crystal-assisted multimode interference coupler[J]. Optics Letters, 2023, 48(1): 171-174.
[11] CHEBEN P, HALIR R, SCHMID J H, et al. Subwavelength integrated photonics[J]. Nature, 2018, 560: 565-572.
[12] XU H N, DAI D X, LIU L, et al. Proposal for an ultra-broadband polarization beam splitter using an anisotropy-engineered Mach-Zehnder interferometer on the x-cut lithium-niobate-on-insulator[J]. Optics Express, 2020, 28(8): 10899-10908.
[13] DENG C Y, LU M J, SUN Y, et al. Broadband and compact polarization beam splitter in LNOI hetero-anisotropic metamaterials[J]. Optics Express, 2021, 29(8): 11627-11634.
[14] TAO J M, LI X T, LI J Y, et al. Compact, high extinction ratio, and low-loss polarization beam splitter on lithium-niobate-on-insulator using a silicon nitride nanowire assisted waveguide and a grooved waveguide[J]. Photonics, 2022, 9(10): 779.
[15] WANG F, LIU H, MA T, et al. Polarization beam splitter based on the asymmetric directional coupler of lithium niobate film[J]. Applied Optics, 2023, 62(1): 21-26.
[16] ZHANG L, ZHANG L, FU X, et al. Compact, broadband and low-loss polarization beam splitter on lithium-niobate-on-insulator using a silicon nanowire assisted waveguide[J]. IEEE Photonics Journal, 2020, 12(5): 1-6.
[17] WU Y N, SUN X R, LI H, et al. Lithium niobate thin film polarization beam splitter based on asymmetric directional coupling[J]. Journal of Lightwave Technology, 2022, 40(24): 7843-7847.
[18] CHANG L, LI Y F, VOLET N, et al. Thin film wavelength converters for photonic integrated circuits[J]. Optica, 2016, 3(5): 531.
[19] HALIR R, MAESE-NOVO A, ORTEGA-MOUX A, et al. Colorless directional coupler with dispersion engineered sub-wavelength structure[J]. Optics Express, 2012, 20(12): 13470-13477.
[20] HALIR R, BOCK P J, CHEBEN P, et al. Waveguide sub-wavelength structures: a review of principles and applications[J]. Laser & Photonics Reviews, 2015, 9(1): 25-49.

基于亚波长光栅辅助定向耦合器的集成铌酸锂偏振分束器

Integrated Lithium Niobate Polarization Beam Splitter Based on a Subwavelength Grating-Assisted Directional Coupler

PDF (PC)

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 1

编辑推荐

Metrics

本文评价