关键词: 类金刚石薄膜;红外;钝化膜;界面

Abstract: A dense and homogeneous nanograins diamond-like carbon (DLC) film has been deposited on the well-polished HgCdTe wafer by radio frequency plasma enhanced chemical vapor deposition at room temperature. The surface photographs of both DLC and MCT are studied by AFM and LFM respectively. The interface of DLC/HgCdTe is studied by AES. Result shows that DLC film can suppress the dissociation of the weak bonding HgTe, and prevent Hg escapingfrom from MCT surface to some extent, when the thickness of DLC film has reached 25nm.AFM and LFM results show that the compositions of some MCT surface regions have dissolved and formed another phase different from MCT substrate, after 30 minutes annealing at 100℃. However this change has not been observed on the surface of DLC coated MCT. This result is agreement with that given by AES.

Key words: A dense and homogeneous nanograins diamond-like carbon (DLC) film has been deposited on the well-polished HgCdTe wafer by radio frequency plasma enhanced chemical vapor deposition at room temperature. The surface photographs of both DLC and MCT are studied by AFM and LFM respectively. The interface of DLC/HgCdTe is studied by AES. Result shows that DLC film can suppress the dissociation of the weak bonding HgTe, and prevent Hg escapingfrom from MCT surface to some extent, when the thickness of DLC film has reached 25nm.AFM and LFM results show that the compositions of some MCT surface regions have dissolved and formed another phase different from MCT substrate, after 30 minutes annealing at 100℃. However this change has not been observed on the surface of DLC coated MCT. This result is agreement with that given by AES.