关键词: 金刚石膜;晶体取向;X射线晶体衍射谱;热导率

Abstract: The radial thermal conductivity is important specification of diamond films. This paper reported the method of estimating the radial thermal conductivity of D C arc jet CVD diamond films through analyzing the correlation between the radial thermal conductivity and the peak value of X-ray diffraction spectrum of the crystal face. It is required that the CPS of (220) and (311) in three-orientation films with main crystal direction (111) are 23-33; and 8-15;, or the CPS of (400) in four-orientation films is as low as 5;. The range of error value is from -9.5; to 3.5;. When the CPS of (220) is high or the CPS of (311) is low, the estimating results are easy to be more than measurement, and vice verse.

Key words: The radial thermal conductivity is important specification of diamond films. This paper reported the method of estimating the radial thermal conductivity of D C arc jet CVD diamond films through analyzing the correlation between the radial thermal conductivity and the peak value of X-ray diffraction spectrum of the crystal face. It is required that the CPS of (220) and (311) in three-orientation films with main crystal direction (111) are 23-33; and 8-15;, or the CPS of (400) in four-orientation films is as low as 5;. The range of error value is from -9.5; to 3.5;. When the CPS of (220) is high or the CPS of (311) is low, the estimating results are easy to be more than measurement, and vice verse.