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人工晶体学报 ›› 2009, Vol. 38 ›› Issue (2): 422-425.

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MPCVD掺硼金刚石薄膜的制备及Ti/BDD 电极上对硝基酚的阳极氧化测试

魏俊俊;贺琦;高旭辉;吕反修;陈广超;朱秀萍;倪晋仁   

  1. 北京科技大学材料科学与工程学院,北京,100083;北京大学环境资源工程学院,北京,100871
  • 出版日期:2009-04-15 发布日期:2021-01-20

Synthesis of Boron Doped Diamond Films by MPCVD and Anodic Oxidation of p-nitrophenol on Ti/BDD Electrode

WEI Jun-jun;HE Qi;GAO Xu-hui;LV Fan-xiu;CHEN Guang-chao;ZHU Xiu-ping;NI Jin-ren   

  • Online:2009-04-15 Published:2021-01-20

摘要: 采用微波等离子体技术在CH4-H2-C2H6气体条件下制备了钛基掺硼金刚石薄膜.四点探针法测得薄膜电阻率在零掺杂时为1×1012Ω*cm ,当反应气源中B/C上升为5×10-3时电阻率降至5×10-3 Ω*cm.扫描电镜显示掺硼金刚石具有完整晶型和致密结构.拉曼光谱观察到金刚石结构在掺杂前后发生明显改变.采用循环伏安测试了Ti/BDD电极的电化学参量,并与PbO2, Sn-Sb and PbO2-Er三种电极进行阳极氧化对-硝基酚的对比实验.结果表明,在Ti/BDD电极上,对-硝基酚的总有机碳去除率接近100;,远高于其它三种电极.

关键词: Ti/BDD电极;微波等离子体;化学气相沉积;对-硝基酚;阳极氧化

Abstract: Boron doped diamond films on Ti substrates were prepared by microwave plasma chemical vapor deposition(MPCVD) in the reactant gas of H2-CH4-B2H6. Resistivity of the undoped and doped films was measured by the 4-probe measurement method, which reduced from 1×1012 -5×10-3 Ω*cm with the increasing of the atomic ratio B/C from 0 to 5×10-3. Scanning electron microscope and Raman spectroscopy were used to characterize the morphology and microstructure of these films. Electrochemical behavior of BDD electrode was tested by Cyclic-voltammetry. p-nitrophenol, a common pollutant, was electrolyzed by using the BDD electrodes, as well as the PbO2, Sn-Sb and PbO2-Er electrodes as anode. The comparison of the removal of the total organic carbon using those electrodes shown above demonstrated that the Ti/BDD electrode producing a TOC decrease of approximately 100; has the best electrochemical property.

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