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人工晶体学报 ›› 2017, Vol. 46 ›› Issue (8): 1464-1469.

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氧氩混合气氛下脉冲激光沉积法制备YBa2Cu3O7-δ薄膜的研究

代秀红;张宇生;葛大勇;娄建忠;赵红东;刘保亭   

  1. 河北工业大学电子信息工程学院,天津 300401;河北大学物理科学与技术学院,保定 071002;河北大学电子信息科学与技术学院,保定,071002;河北大学物理科学与技术学院,保定,071002;河北工业大学电子信息工程学院,天津,300401
  • 出版日期:2017-08-15 发布日期:2021-01-20
  • 基金资助:
    国家自然科学基金(11374086);河北省自然科学基金(E2014201188)

Investigation of YBa2Cu3O7-δ Film Deposited in O2/Ar Mixture Atmosphere by Pulsed Laser Deposition

DAI Xiu-hong;ZHANG Yu-sheng;GE Da-yong;LOU Jian-zhong;ZHAO Hong-dong;LIU Bao-ting   

  • Online:2017-08-15 Published:2021-01-20

摘要: 利用脉冲激光沉积法(PLD),在质量流量比为1∶3的氧气和氩气的混合气氛下,在STO(001) 基片上制备了外延的YBa2Cu3O7-δ(YBCO)超导薄膜.尽管薄膜表面分布有亚微米到微米量级颗粒,但与传统PLD制备YBCO的方法相比,大颗粒的密度要小得多.直流电阻和磁化率测量法同时证明了YBCO薄膜的超导转变温度(Tc)大于90 K. 在40 K时,零场临界电流密度(Jc)为63.8 MA/cm2,在5.2 T时达到最大钉扎力密度(Fpmax)387.9 GN/m3;在65 K时,零场Jc为28.3 MA/cm2,在2.6 T时Fpmax达到71.3 GN/m3;在77 K时,零场Jc为8.7 MA/cm2,在0.91 T时Fpmax达到12.1 GN/m3.研究结果为氧气和氩气混合气氛下PLD方法制备YBCO薄膜提供了重要实验数据.

关键词: 脉冲激光沉积;氧氩混合气氛;YBCO超导薄膜;临界电流密度;磁通钉扎力密度

Abstract: The YBa2Cu3O7-δ(YBCO)superconducting film was fabricated epitaxially on STO(001) substrate by pulsed laser deposition method (PLD) in O2/Ar mixture atmosphere with the mass flow rate ratio of 1∶3.The density of the particles with submicron to micron-sized distributed on the film surface is lower compared with the YBCO film deposited by traditional PLD method.The supconducting transition temperature (Tc) is above 90 K measured by DC resistance as well as the magnectic susceptibility.The zero field critical current density (Jc) is 63.8 MA/cm2, 28.3 MA/cm2 and 8.7 MA/cm2 at 40 K, 65 K and 77 K, respectively.The flux pinning force density reaches the maximum of 387.9 GN/m3 at 5.2 T, 71.3 GN/m3 at 2.6 T, and 12.1 GN/m3 at 0.91 T at 40 K, 65 K and 77 K, respectively.The experimental results provide valuable reference for further study of superconducting films deposited in Ar/O2 mixture atmosphere by PLD method.

Key words: The YBa2Cu3O7-δ(YBCO)superconducting film was fabricated epitaxially on STO(001) substrate by pulsed laser deposition method (PLD) in O2/Ar mixture atmosphere with the mass flow rate ratio of 1∶3.The density of the particles with submicron to micron-sized distributed on the film surface is lower compared with the YBCO film deposited by traditional PLD method.The supconducting transition temperature (Tc) is above 90 K measured by DC resistance as well as the magnectic susceptibility.The zero field critical current density (Jc) is 63.8 MA/cm2, 28.3 MA/cm2 and 8.7 MA/cm2 at 40 K, 65 K and 77 K, respectively.The flux pinning force density reaches the maximum of 387.9 GN/m3 at 5.2 T, 71.3 GN/m3 at 2.6 T, and 12.1 GN/m3 at 0.91 T at 40 K, 65 K and 77 K, respectively.The experimental results provide valuable reference for further study of superconducting films deposited in Ar/O2 mixture atmosphere by PLD method.

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