关键词: ZnO薄膜;低压化学气相沉积;导电率;透光率;退火气氛

Abstract: B doped ZnO ( BZO ) thin films were fabricated on glass substrates by LPCVD method .The effects of vacuum and hydrogen atmosphere annealing on the optical and electrical properties of BZO thin films were studied respectively .The results show that the two thermal treatments in vacuum and hydrogen atmosphere lead to reverse effects on optical and electric properties of BZO thin films .After vacuum annealing , the electrical conductivity of BZO thin films decreased with annealing temperature increasing and the total transmission of BZO thin films increased over long-wavelength range due to reduction of carrier concentration.On the contrary, after a post thermal treatment in hydrogen atmosphere , the electrical conductivity of the BZO films was obviously improved , simultaneously keeping the transmittance almost the same , which may be attributed to a dramatic increase of carrier mobility .This hydrogen annealing should provide a method for further improving the optical and electrical properties of BZO thin films.

Key words: B doped ZnO ( BZO ) thin films were fabricated on glass substrates by LPCVD method .The effects of vacuum and hydrogen atmosphere annealing on the optical and electrical properties of BZO thin films were studied respectively .The results show that the two thermal treatments in vacuum and hydrogen atmosphere lead to reverse effects on optical and electric properties of BZO thin films .After vacuum annealing , the electrical conductivity of BZO thin films decreased with annealing temperature increasing and the total transmission of BZO thin films increased over long-wavelength range due to reduction of carrier concentration.On the contrary, after a post thermal treatment in hydrogen atmosphere , the electrical conductivity of the BZO films was obviously improved , simultaneously keeping the transmittance almost the same , which may be attributed to a dramatic increase of carrier mobility .This hydrogen annealing should provide a method for further improving the optical and electrical properties of BZO thin films.