关键词: 离子注入;蓝宝石;表面改性

Abstract: Ions implantation has proven to be a reliable way for sapphire to create new optical and mechanical surface proper-ties. In this paper, the magnesium/titanium ions were chosen to implant in the surface modification of sapphire with different ions energy and fluence. The projected range and straggling of ions were calculated by simulation program of the Transport of Ion Matter code. Information about the damage depth distribution and the occurrence of microstructural modifications were ana-lyzed by Raman spectroscopy and glancing incidence X-ray diffraction. According to the test results, the nanohardness, nano-scratch and infrared properties of sapphire show a tunable property with the ion implantation.

Key words: Ions implantation has proven to be a reliable way for sapphire to create new optical and mechanical surface proper-ties. In this paper, the magnesium/titanium ions were chosen to implant in the surface modification of sapphire with different ions energy and fluence. The projected range and straggling of ions were calculated by simulation program of the Transport of Ion Matter code. Information about the damage depth distribution and the occurrence of microstructural modifications were ana-lyzed by Raman spectroscopy and glancing incidence X-ray diffraction. According to the test results, the nanohardness, nano-scratch and infrared properties of sapphire show a tunable property with the ion implantation.