基于钠助熔剂法的GaN单晶生长研究进展

人工晶体学报 ›› 2023, Vol. 52 ›› Issue (2): 183-195.

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基于钠助熔剂法的GaN单晶生长研究进展

王本发¹, 王守志¹, 王国栋¹, 俞娇仙², 刘磊¹, 李秋波¹, 武玉珠¹, 徐现刚¹, 张雷¹

1.山东大学晶体材料国家重点实验室,新一代半导体材料研究院,济南 250100;
2.齐鲁工业大学(山东省科学院),材料科学与工程学院,济南 250353

收稿日期:2022-11-14 出版日期:2023-02-15 发布日期:2023-03-08
通信作者: 王守志,博士,研究员。E-mail:wangsz@sdu.edu.cn张雷,博士,副教授。E-mail:leizhang528@sdu.edu.cn
作者简介:王本发(1997—),男,山东省人,硕士研究生。E-mail:a3107128036@163.com
基金资助:
国家自然科学基金(52202265,51872164)

Research Progress on the Growth of GaN Single Crystal by Sodium Flux Method

WANG Benfa¹, WANG Shouzhi¹, WANG Guodong¹, YU Jiaoxian², LIU Lei¹, LI Qiubo¹, WU Yuzhu¹, XU Xiangang¹, ZHANG Lei¹

1. Institute of Novel Semiconductors, State Key Laboratory of Crystal Material, Shandong University, Jinan 250100, China;
2. School of Materials Science and Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China

Received:2022-11-14 Online:2023-02-15 Published:2023-03-08

摘要/Abstract

摘要： 宽禁带氮化镓(GaN)材料以其独特的性质和应用前景成为国内外研究的热点,高质量GaN单晶衬底的制备是获得性能优异的光电子器件和功率器件的基础。钠助熔剂法生长条件温和,易获得高质量、大尺寸的GaN单晶,是一种具有广阔商业化前景的GaN单晶生长方法。钠助熔剂法自20世纪90年代末期被发明以来,经过20多年的发展,钠助熔剂法生长的晶体在尺寸与质量上都取得了长足的进步。本文从晶体生长原理和关键工艺(籽晶选择、温度梯度以及添加剂)等方面综述了钠助熔剂法生长GaN单晶研究进展,并对其面临的挑战和未来发展趋势进行了展望。

关键词: 氮化镓单晶, 钠助熔剂法, 原料比, 温度梯度, 添加剂, 籽晶

Abstract: Gallium nitride (GaN) material has become a research hotspot at home and abroad because of its unique properties and application prospects. High quality GaN single crystals are the prerequisite for obtaining optoelectronic devices and power devices with excellent performance. Because of its mild growth conditions, the sodium flux method is easy to obtain high quality and large size GaN single crystals, and it is a promising method for the growth of GaN single crystals. Since the sodium flux method was invented in the late 1990s, the crystals grown by the sodium flux method have made considerable progress in size and quality after more than 20 years of development. Recent research progress of GaN single crystals grown by the sodium flux method from the aspects of crystal growth principle, seed crystal selection, temperature gradient and additives are summarized in this paper, and the challenges and future development trend are also prospected.

Key words: gallium nitride single crystal, sodium flux method, raw material ratio, temperature gradient, additive, seed crystal

中图分类号:

O782

王本发, 王守志, 王国栋, 俞娇仙, 刘磊, 李秋波, 武玉珠, 徐现刚, 张雷. 基于钠助熔剂法的GaN单晶生长研究进展[J]. 人工晶体学报, 2023, 52(2): 183-195.

WANG Benfa, WANG Shouzhi, WANG Guodong, YU Jiaoxian, LIU Lei, LI Qiubo, WU Yuzhu, XU Xiangang, ZHANG Lei. Research Progress on the Growth of GaN Single Crystal by Sodium Flux Method[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(2): 183-195.

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基于钠助熔剂法的GaN单晶生长研究进展

Research Progress on the Growth of GaN Single Crystal by Sodium Flux Method

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