终端金刚石能带结构与物理性能的研究进展

摘要/Abstract

摘要： 5G 通信、能源互联网、新能源汽车、量子技术等高精尖领域对半导体的性能提出了新的更高的要求。第四代半导体金刚石因具有优异的物理化学性能被誉为“终极半导体”,被认为是制备下一代高功率、高频、高温及低功率损耗电子器件最理想的材料。而浅n型掺杂的技术瓶颈一定程度阻碍了金刚石半导体应用的发展。表面终端研究为金刚石功能化的发展提供了新的策略,金刚石通过表面终端实现了场效应晶体管、肖特基二极管、日盲紫外探测器、电子发射器件和近表面色心调控等重要应用,而表面终端发挥作用的机理与其能带结构特点密不可分。本文综述了几种常见终端的能带研究方法,分析其能带的结构特点,结合特点介绍其发挥作用的机理,并进行了总结和展望。

关键词: 金刚石, 表面终端, 能带结构, 二维空穴气, 肖特基结, 紫外探测

Abstract: 5G communication, energy internet, new energy automobiles, quantum technology and other advanced and sophisticated fields have put forward new and higher requirements for the performance of semiconductors. The fourth generation of semiconductor diamond is known as the “ultimate semiconductor” because of its excellent physical and chemical properties. It is considered to be the most ideal material for developing the next generation of high power, high frequency, high temperature and low power loss electronic devices. However, the technical bottleneck of shallow n-type doping has hindered the development of diamond semiconductor applications to a certain extent. The research of surface terminals has provided new strategies for the development of diamond functionalization. Diamond has realized important applications such as field effect transistors, Schottky diodes, solar-blind ultraviolet detectors, electronic emission devices and near-surface color center tuning through surface terminals. The mechanism of surface terminals exerting effects is inseparable from the characteristics of their energy band structure. In this paper, the research methods of energy band structure of several common terminals are summarized, the characteristics of their energy band structures are analyzed, the mechanism of exerting effects in combination with the characteristics are introduced, finally prospected.

Key words: diamond, surface terminal, energy band structure, two-dimensional hole gas, Schottky junction, ultraviolet detection

中图分类号:

TQ163
TN386

乔鹏飞, 刘康, 代兵, 刘本建, 张森, 张晓晖, 朱嘉琦. 终端金刚石能带结构与物理性能的研究进展[J]. 人工晶体学报, 2023, 52(6): 945-959.

QIAO Pengfei, LIU Kang, DAI Bing, LIU Benjian, ZHANG Sen, ZHANG Xiaohui, ZHU Jiaqi. Research Progress on Energy Band Structure and Physical Properties of Terminated Diamond[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(6): 945-959.

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