脉冲激光沉积技术制备超导薄膜的研究进展

摘要/Abstract

摘要： 超导薄膜不仅在超导应用方面扮演着举足轻重的角色,而且是超导机理研究的良好载体,是连接超导应用和机理的桥梁。脉冲激光沉积(PLD)是最常用的超导薄膜制备技术之一。本文综述了PLD技术制备铜氧化物、铁基、氮化物、钛氧化物等超导薄膜的研究进展,并介绍了与高温超导薄膜应用相关的两种PLD新技术:超导带材和大面积薄膜制备。最后,本文介绍了基于材料基因工程的高通量组合薄膜技术在高温超导研究上的典型成功案例。继续发展和使用该实验技术,构建与高温超导相关的高维相图和定量规律,有望实现机理研究实验上从量变到质变的全面突破。

关键词: 超导薄膜, 脉冲激光沉积, 超导机理, 超导应用, 高温超导, 高通量组合薄膜

Abstract: Since playing an indispensable role in both the application and mechanism of superconductivity, superconducting films are the important link between them. Pulsed laser deposition (PLD) is one of the most commonly used techniques for growing superconducting films. In this article, the research progress on superconducting films including cuprate, iron-based, nitride and titanium oxide films by PLD is reviewed, and two developed PLD methods like superconducting long-tape and large-area-film techniques for the practical application of high-T_c superconductors are introduced. Additionally, an advanced film preparation method for high-throughput combinatorial films based on genetic engineering is recently utilized for the research of high-T_c superconductivity. Further development of the novel high-throughput superconductivity research mode will be successfully employed for building high-dimensional phase diagrams, exploring more key quantitative laws and then understanding the underlying mechanism of high-T_c superconductivity.

Key words: superconducting film, pulsed laser deposition, mechanism of superconductivity, application of superconductor, high-T_c superconductor, high-throughput combinatorial film

中图分类号:

TM26
O484.1

林泽丰, 孙伟轩, 刘天想, 涂思佳, 倪壮, 柏欣博, 赵展艺, 张济全, 陈赋聪, 胡卫, 冯中沛, 袁洁, 金魁. 脉冲激光沉积技术制备超导薄膜的研究进展[J]. 人工晶体学报, 2023, 52(6): 1036-1051.

LIN Zefeng, SUN Weixuan, LIU Tianxiang, TU Sijia, NI Zhuang, BAI Xinbo, ZHAO Zhanyi, ZHANG Jiquan, CHEN Fucong, HU Wei, FENG Zhongpei, YUAN Jie, JIN Kui. Research Progress on Superconducting Films Prepared by Pulsed Laser Deposition[J]. JOURNAL OF SYNTHETIC CRYSTALS, 2023, 52(6): 1036-1051.

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