表面预处理对SiO2/Si结构上APCVD生长SiC薄膜的影响
贾护军;杨银堂;柴常春;李跃进
Influences of Surface Pretreatment on SiC Films Grown by Atmospheric Pressure Chemical Vapor Deposition Process on SiO2/Si Structures
JIA Hu-jun;YANG Yin-tang;CHAI Chang-chun;LI Yue-jin
人工晶体学报
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2006, (3): 510
-513
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