Abstract: The chemical compositions and their content of nanomaterials have important influence on their physical properties with respect to the optics, electrics, acoustics, calorifics, magnetism and so on. Electron microanalysis was one of important methods to characterize chemical composition of nanocrystallites. This paper reviewed the latest application and progress of modern electron microanalysis techniques such as energy-dispersive X-ray spectroscopy (EDS), wavelength-dispersive X-ray spectroscopy (WDS), electron energy loss spectroscopy (EELS) and selected area electron diffraction (SAED) in the characterization of chemical composition, morphology, size and phase structure of nanocrystallites. The differences among these analytic methods were comparatively discussed. Their disadvantages in the application and developing direction in the future were also indicated.

Key words: The chemical compositions and their content of nanomaterials have important influence on their physical properties with respect to the optics, electrics, acoustics, calorifics, magnetism and so on. Electron microanalysis was one of important methods to characterize chemical composition of nanocrystallites. This paper reviewed the latest application and progress of modern electron microanalysis techniques such as energy-dispersive X-ray spectroscopy (EDS), wavelength-dispersive X-ray spectroscopy (WDS), electron energy loss spectroscopy (EELS) and selected area electron diffraction (SAED) in the characterization of chemical composition, morphology, size and phase structure of nanocrystallites. The differences among these analytic methods were comparatively discussed. Their disadvantages in the application and developing direction in the future were also indicated.