Fabrication of CVD Diamond Microgear for Micro-machine Application

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2011, Vol. 40 ›› Issue (6): 1399-1403.

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Fabrication of CVD Diamond Microgear for Micro-machine Application

WANG Hong-jun;ZUO Dun-wen;XU Feng;LU Wen-zhuang;WANG Min

Online:2011-12-15 Published:2021-01-20

Abstract

CLC Number:

O436

WANG Hong-jun;ZUO Dun-wen;XU Feng;LU Wen-zhuang;WANG Min. Fabrication of CVD Diamond Microgear for Micro-machine Application[J]. Journal of Synthetic Crystals, 2011, 40(6): 1399-1403.

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Fabrication of CVD Diamond Microgear for Micro-machine Application

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