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JOURNAL OF SYNTHETIC CRYSTALS ›› 2013, Vol. 42 ›› Issue (9): 1808-1813.

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Effects of Argon Oxygen Flow Rate on the Microstructure and Optical Properties of ZAO Thin Films

ZHU Hua;WAN Wen-qiong;KUANG Hui-yun;FENG Xiao-wei   

  • Online:2013-09-15 Published:2021-01-20

CLC Number: