Fabrication of β-FeSi2 Films on 6H-SiC and Si Substrates

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JOURNAL OF SYNTHETIC CRYSTALS ›› 2016, Vol. 45 ›› Issue (3): 629-632.

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Fabrication of β-FeSi2 Films on 6H-SiC and Si Substrates

NING Yao-bin;PU Hong-bin;CHEN Chun-lan;LI Hong;LI Liu-chen

Online:2016-03-15 Published:2021-01-20

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TM23

NING Yao-bin;PU Hong-bin;CHEN Chun-lan;LI Hong;LI Liu-chen. Fabrication of β-FeSi2 Films on 6H-SiC and Si Substrates[J]. Journal of Synthetic Crystals, 2016, 45(3): 629-632.

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Fabrication of β-FeSi2 Films on 6H-SiC and Si Substrates

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